Senior EUV Research Scientist - Droplet Gen & Metrology

ASML US, LLC

San Diego (CA)

On-site

USD 127,000 - 175,000

Full time

14 days+

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Job summary

ASML US, LLC is seeking a Senior Scientist – EUV Research to join our Technology Development team. You will conceive and demonstrate technologies for next-generation high-power EUV light sources, based on laser-produced plasma, spanning lasers, optics, metrology and control.

You will lead multi-disciplinary work, translate multi-physics challenges into actionable experiments, and guide the droplets generator architecture from feasibility to hardware implementation, shaping future EUV capability

Qualifications

PhD or MS degree with 3+ years relevant experience in materials, mechanical, chemical engineering, material science, physics, optics, or equivalent field.
Hands-on experience with complex, high‑pressure system design and build, including rapid prototyping, characterization and troubleshooting via breadth of metrology techniques, and system‑level demonstrations.
Deep understanding of scientific research methods and strong scientific curiosity, with demonstrated knowledge in metrology development and data analysis.

Responsibilities

Guide development of high‑level architecture used for the generation of droplets in the EUV source.
Lead the design of droplet generation hardware and build the needed metrology + testing capabilities to demonstrate the droplet performance up to 1000's of Kbar.
Provide input to technology roadmaps and identify key scientific learning objectives and define corresponding experimental design to arrive at design guidelines, performance requirements and procedures to product teams.
Identification of key scientific learning objectives and corresponding experimental design which will further the technological progress of the EUV generation process
Develop and execute system and subsystem performance tests, analyze test results and extract actionable knowledge from sub‑module to full‑system levels.
Troubleshoot issues with droplet generation, tin delivery, and optical systems in order to improve droplet performance at the bench and source level.
Document learning and communicate knowledge to engineering and product development teams to guide product improvement and release of new product nodes.
Work independently and in teams to deliver on a stated objective, whether it be the pursuit of new knowledge, the demonstration of a new capability, or the characterization of existing performance.