Remote Field Service Engineer, Plasma Technology

Oxford Instruments; West Concord (MA); On-site; USD 90,000 - 110,000; Full time

Job summary

Oxford Instruments seeks a Field Service Engineer for Plasma Technology to deliver installation, maintenance, and support across North America. You will travel frequently to customer sites, install plasma etch and deposition systems, and train customers to operate them in cleanroom environments.

The role requires hands-on expertise with vacuum tech, RF systems, and semiconductor processes, plus strong problem-solving and communication skills to ensure high uptime and customer satisfaction.

Qualifications

• Bachelor's degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field.
• Equivalent hands-on experience in semiconductor equipment service may substitute.
• 3-5 years of field service experience in the semiconductor industry, with a focus on plasma etch and deposition systems.
• Familiarity with cleanroom operations and safety protocols.
• Hands-on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps.
• Skilled in troubleshooting 208V electrical systems and 24V control subsystems.
• Proficient with diagnostic instruments: vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters, megohm meters.
• Strong understanding of RF theory and inductively coupled plasma (ICP) systems.
• Familiarity with semiconductor processes: RIE, PECVD, ICP, ALD.
• Held a valid driver's license, passport, and ability to travel independently.
• Must be physically agile and capable of lifting up to 50 lbs.
• Commit to extensive weekday travel Monday through Friday.

Responsibilities

• Lead installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD) ensuring compliance with specifications and cleanroom standards.
• Execute preventive & corrective maintenance, diagnose root causes, and validate repairs against vacuum tolerances and process benchmarks.
• Build trust and provide hands-on training; engage customers to operate systems confidently.
• Resolve complex hardware and software issues using diagnostic tools; provide remote support as needed to minimize downtime.
• Calibrate components and implement upgrades to improve system reliability and throughput.

Skills

Problem solving

Communication

Travel willingness

Manual dexterity

Cleanroom etiquette

Education

Bachelor's degree in Electrical Engineering, Mechanical Engineering, Physics, or related field

Tools

Vacuum pumps

RF power meters

LCR meters

Multimeters

DVMs

Job description

Oxford Instruments seeks a Field Service Engineer for Plasma Technology to deliver installation, maintenance, and support across North America. You will travel frequently to customer sites, install plasma etch and deposition systems, and train customers to operate them in cleanroom environments.

The role requires hands-on expertise with vacuum tech, RF systems, and semiconductor processes, plus strong problem-solving and communication skills to ensure high uptime and customer satisfaction.