Senior CMP Process Engineer: Drive Planarity & Yield

ASM International; Phoenix (AZ); On-site; USD 120,000 - 180,000; Full time

Job summary

ASM International is seeking a CMP Process Engineer to lead development and optimization of polishing and post-CMP cleaning processes for advanced semiconductor devices. You will design experiments, analyze complex data, and drive process improvements across FEOL/BEOL flows while interfacing with R&D, manufacturing, and customers.

In this role you will develop robust metrology strategies, establish process windows, and support technology transfer with field teams.

Qualifications

• Experience in CMP process development/integration for semiconductor manufacturing.
• Strong knowledge of slurry chemistry, abrasives, and post-CMP cleaning.
• Experience with DOE, SPC, and root-cause methods.
• Familiarity with pattern-dependent CMP effects and device integration requirements.

Responsibilities

• Develop, qualify, and optimize CMP unit processes for FEOL/BEOL applications and advanced materials.
• Design and conduct experiments using DOE/RSM to meet performance targets.
• Lead analysis of RR, WIWNU, edge performance, and defect control; establish process windows and baselines.
• Collaborate with R&D, manufacturing, service teams, and customers to enable successful product transfer.

Skills

CMP process development

Design of Experiments

SPC / capability analyses

Metrology & surface characterization

Cross-functional collaboration

Education

Bachelor's degree in Chemical Engineering, Materials Science, Mechanical Engineering, Electrical Engineering, Chemistry, or Physics

Tools

DOE software

Metrology software

Job description

ASM International is seeking a CMP Process Engineer to lead development and optimization of polishing and post-CMP cleaning processes for advanced semiconductor devices. You will design experiments, analyze complex data, and drive process improvements across FEOL/BEOL flows while interfacing with R&D, manufacturing, and customers.

In this role you will develop robust metrology strategies, establish process windows, and support technology transfer with field teams.