CMP Process Engineer: Mastery in Semiconductor Polishing

ASM; Phoenix (AZ); On-site; USD 90,000 - 150,000; Full time

Job summary

ASM is seeking a CMP Process Engineer in Phoenix to develop and optimize CMP and post-CMP cleaning processes for semiconductor devices. You will design experiments, analyze data, and transfer processes across R&D, product engineering, and field teams, delivering robust solutions and IP contributions.

Ideal candidates have 2+ years in CMP process development or integration, strong DOE/STAT tools experience, and a collaborative mindset to support product adoption and customer demonstrations.

Qualifications

• 2+ years in CMP process development, integration, or applications engineering.
• Experience with slurry chemistry, abrasives, and post-CMP cleaning.
• Experience with DOE, SPC, and root-cause methods.
• Ability to interpret metrology data and correlate to yield.
• Strong communication and teamwork across R&D, engineering, and service.

Responsibilities

• Develop, qualify, and optimize CMP unit processes for FEOL/BEOL applications.
• Design experiments using DOE and RSM.
• Analyze RR maps, thickness, and defect data.
• Lead process windows, control plans, and capability analyses.
• Transfer processes to manufacturing and support customer demonstrations.

Skills

CMP process knowledge

Process optimization

DOE/RS

Metrology & characterization

Root cause analysis

Cross-functional collaboration

Documentation & reporting

Education

Bachelor's degree in Chemical Engineering, Materials Science, Mechanical Engineering, Electrical Engineering, Chemistry, or Physics

Tools

Profilometry

Ellipsometry

AFM

SEM/Optical inspection

Job description

ASM is seeking a CMP Process Engineer in Phoenix to develop and optimize CMP and post-CMP cleaning processes for semiconductor devices. You will design experiments, analyze data, and transfer processes across R&D, product engineering, and field teams, delivering robust solutions and IP contributions.

Ideal candidates have 2+ years in CMP process development or integration, strong DOE/STAT tools experience, and a collaborative mindset to support product adoption and customer demonstrations.