Senior/Principal Process Engineer – Silicon Epitaxy (Si-Si Epi)

Tata Electronics Pvt. Ltd.; Dholera; On-site; INR 1,800,000 - 3,000,000; Full time

Job summary

Tata Electronics Pvt. Ltd. seeks a highly motivated Silicon Epitaxy Process Engineer to develop, optimize, qualify, and sustain Si-Si epitaxial growth on 300mm wafers.

You will support ASM and AMAT epitaxy reactors and collaborate with Integration, Device, Yield, Equipment, and Manufacturing teams to meet quality, cost, cycle time, and yield targets. You will own and optimize epi platforms, drive process improvements, analyze metrology data, and ensure robust, repeatable processes for CMOS, BCD,

Qualifications

• 4+ years of semiconductor process engineering experience.
• 3+ years of hands-on experience in Silicon Epitaxy.
• Experience with ASM and/or Applied Materials Epi tools is highly preferred.

Responsibilities

• Develop and optimize silicon epitaxial growth processes for CMOS, BCD, Power, Analog, and HV technologies.
• Non-selective Si epitaxy.
• Thick and thin epi layers.
• High-voltage and power device epi requirements.
• Optimize critical parameters including: Growth rate, Thickness uniformity, Doping concentration and uniformity, Surface roughness, Haze and morphology.
• Evaluate process windows and define control plans.
• Own and sustain ASM Intrepid and/or AMAT Centura Epi platforms.
• Drive equipment matching and chamber-to-chamber consistency.
• Lead process qualifications following preventive maintenance, hardware changes, and chamber rebuilds.
• Work with Equipment Engineering to improve: Uptime, MTBF, Throughput, Process capability.
• Investigate excursions using SPC and data analytics.
• Drive reduction of: Stacking faults, Slip lines, Transition widths, Contamination issues.
• Perform root cause analysis and implement corrective actions.
• Analyze and interpret metrology data from SIMS, CV Profiling, XRD, TEM, SEM, AFM, Optical Inspection, FTIR, Four Point Probe.
• Correlate material characteristics with electrical and device performance.
• Support NPI and technology ramp activities.
• Transfer epitaxy processes from development to manufacturing.
• Generate process specifications, FDC limits, OCAPs, and control plans.
• Provide manufacturing support for yield and output improvement initiatives.
• Partner with Process Integration, Manufacturing, Quality, EHS; Coordinate with suppliers and OEMs for process and hardware improvements.

Skills

Semiconductor processing

Silicon epitaxy

Cross-functional collaboration

Data analysis

Education

Electrical Engineering

Chemical Engineering

Physics

Tools

ASM Intrepid

AMAT Centura

AMAT Epi Systems

JMP

Spotfire

Python

Minitab

SPC/FDC

Job description

We are seeking a highly motivated Silicon Epitaxy Process Engineer responsible for the development, optimization, qualification, and sustaining of Si-Si epitaxial growth processes on 300mm wafers. The engineer will support ASM and/or Applied Materials epitaxy reactors and work closely with Integration, Device, Yield, Equipment, and Manufacturing teams to deliver robust epitaxial processes meeting quality, cost, cycle time, and yield targets.

Key Responsibilities

• Develop and optimize silicon epitaxial growth processes for CMOS, BCD, Power, Analog, and HV technologies.
• Non-selective Si epitaxy
• Thick and thin epi layers
• High-voltage and power device epi requirements
• Optimize critical parameters including:
• Growth rate
• Thickness uniformity
• Doping concentration and uniformity
• Surface roughness
• Haze and morphology
• Evaluate process windows and define control plans.

Ownerships

• Own and sustain ASM Intrepid and/or AMAT Centura Epi platforms.
• Drive equipment matching and chamber-to-chamber consistency.
• Lead process qualifications following preventive maintenance, hardware changes, and chamber rebuilds.
• Work with Equipment Engineering to improve:
• Uptime
• MTBF
• Throughput
• Process capability

Yield & Defect Reduction

• Investigate excursions using SPC and data analytics.
• Drive reduction of:
• Stacking faults
• Slip lines
• Transition widths
• Contamination issues
• Perform root cause analysis and implement corrective actions.

Process Characterization

• Analyze and interpret metrology data from:
• SIMS
• CV Profiling
• XRD
• TEM
• SEM
• AFM
• Optical Inspection
• FTIR
• Four Point Probe
• Correlate material characteristics with electrical and device performance.
• Support NPI and technology ramp activities.
• Transfer epitaxy processes from development to manufacturing.
• Generate process specifications, FDC limits, OCAPs, and control plans.
• Provide manufacturing support for yield and output improvement initiatives.

Cross-Functional Collaboration

• Partner with:
• Process Integration
• Manufacturing
• Quality
• EHS
• Coordinate with suppliers and OEMs for process and hardware improvements.

Required Qualifications

Education

• Electrical Engineering
• Chemical Engineering
• Physics

Experience

• 4+ years of semiconductor process engineering experience.
• 3+ years of hands‑on experience in Silicon Epitaxy.
• Experience with ASM and/or Applied Materials Epi tools is highly preferred.

Technical Skills:

Epitaxy Process Knowledge

• Silicon homoepitaxy fundamentals
• Gas chemistry:
• HCl chemistry
• PH₃
• AsH₃
• Auto-doping control

Equipment Knowledge

• ASM Intrepid
• AMAT Centura RP Epi
• AMAT Epi Systems
• Knowledge of reactor hardware, gas delivery, wafer handling, and thermal systems.

Data Analysis

• JMP
• Spotfire
• Python
• Minitab
• SPC/FDC systems
• DOE methodology
• Statistical analysis and process capability evaluation