Senior Mechanical Engineering Leader, EUV Subsystems

KLA-Belgium

Milpitas (CA)

On-site

USD 181,000 - 308,000

Full time

14 days+
Application generator

Turn this role into an interview — a resume and cover letter built around what this employer wants.

Get past ATS filters

Benefits offered by this job

Medical
Dental
Vision
401(k) with match
ESPP
Paid time off

Job summary

KLA is seeking a Senior Mechanical Engineering Manager to lead mechanical development for next‑gen EUV reticle inspection hardware in Milpitas, CA. You will oversee a multidisciplinary team delivering high‑precision, vacuum‑rated systems in demanding environments.

Responsibilities include defining architecture, driving reviews, and partnering with Technology, Optics, Systems, and Production Development to improve cost, reliability, and manufacturability. International travel possible.

Qualifications

  • BS in Mechanical Engineering with 10+ years of hardware development in semiconductor tools.
  • 5+ years of people management leading engineers through concept-to-release development.
  • Expertise in vacuum/UHV design, precision mechanisms, and thermal-structural design.
  • Strong cross-functional communication and leadership skills.

Responsibilities

  • Lead and develop a high-performing mechanical engineering team and set technical direction.
  • Own mechanical system architecture for EUV source subsystems.
  • Drive design reviews, validation planning, and documentation quality.
  • Collaborate with Technology, Optics, Systems, and Manufacturing to improve cost and reliability.
  • Manage supplier engagement for precision parts and ensure safety-by-design.

Skills

Vacuum/UHV design
Precision mechanisms
Thermal-structural design
Vibration/dynamics
Contamination-aware design
Design-for-manufacturability/service
Cross-functional leadership

Education

B.S. Mechanical Engineering
M.S. Mechanical Engineering

Job description

KLA is seeking a Senior Mechanical Engineering Manager to lead mechanical development for next‑gen EUV reticle inspection hardware in Milpitas, CA. You will oversee a multidisciplinary team delivering high‑precision, vacuum‑rated systems in demanding environments.

Responsibilities include defining architecture, driving reviews, and partnering with Technology, Optics, Systems, and Production Development to improve cost, reliability, and manufacturability. International travel possible.

Get your free, confidential resume review.

or drag and drop your file here.

Similar jobs

Similar jobs worth comparing

Sr. Mechanical Engineering Manager — Vacuum Systems
Sr. Mechanical Engineering Manager — Vacuum Systems

KLA-Belgium • Milpitas (CA)

On-site
USD 181,000 - 308,000
Medical
Dental
Vision
+3
Senior Mechanical Design Lead for Wafer Inspection Systems
Senior Mechanical Design Lead for Wafer Inspection Systems

KLA • Milpitas (CA)

On-site
USD 181,000 - 307,700
Medical, dental, vision
401(k) with company matching
Employee stock purchase program (ESPP)
+1
Software Engineering Manager - Diagnostics & AI
Software Engineering Manager - Diagnostics & AI

KLA • Milpitas (CA)

On-site
USD 167,000 - 246,000
Senior EUV Vacuum Mechanical Design Engineer
Senior EUV Vacuum Mechanical Design Engineer

KLA-Belgium • Milpitas (CA)

On-site
USD 118,000 - 200,000
Medical, dental, vision
401(k) matching
Employee stock purchase program (ESPP)
+1
Lead Mechanical Design for Advanced Wafer Inspection Systems
Lead Mechanical Design for Advanced Wafer Inspection Systems

KLA-Belgium • Milpitas (CA)

On-site
USD 181,000 - 308,000
Medical
Dental
Vision
+2
Lead Mechanical Design Engineer, UHV/HV Precision Systems
Lead Mechanical Design Engineer, UHV/HV Precision Systems

KLA-Belgium • Milpitas (CA)

On-site
USD 141,000 - 240,000
401(k) matching
Employee stock purchase plan (ESPP)
Tuition reimbursement
+2
Senior Mechanical Design Engineer Vacuum Systems
Senior Mechanical Design Engineer Vacuum Systems

KLA-Belgium • Milpitas (CA)

On-site
USD 118,000 - 173,000
Medical
Dental
Vision
+4
Software Engineering Manager – AI Diagnostics
Software Engineering Manager – AI Diagnostics

KLA-Belgium • Milpitas (CA)

On-site
USD 167,000 - 246,000
Medical benefits
Dental benefits
Vision benefits
+3
Senior Mechatronics Engineer: Precision Motion in EUV
Senior Mechatronics Engineer: Precision Motion in EUV

KLA-Belgium • Milpitas (CA)

On-site
USD 118,000 - 200,000
401(k) matching
Employee stock purchase program (ESPP)
Tuition reimbursement
+1
Lead Mechanical Design Engineer - Semiconductor Metrology
Lead Mechanical Design Engineer - Semiconductor Metrology

KLA-Belgium • Milpitas (CA)

On-site
USD 140,000 - 230,000
Medical insurance
Dental insurance
Vision insurance
+5