Senior Field Service Engineer — HVM Semiconductor Systems

Oxford Instruments plc; Town of Texas (WI); On-site; USD 95,000 - 115,000; Full time

Job summary

Oxford Instruments plc seeks an experienced Senior onsite Field Service Engineer to support High Volume Manufacturing (HVM) semiconductor customers. You will lead installation, preventive and corrective maintenance, and on-site training to maximize uptime and production.

The role requires 3–5 years in semiconductor equipment service, strong RF/ICP knowledge, and ability to travel extensively Monday through Friday.

Qualifications

• Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Physics, or related technical field.
• Equivalent hands‑on experience in semiconductor equipment service may substitute.
• 3–5 years of field service experience in the semiconductor industry, with a focus on plasma etch and deposition systems.
• Familiarity with cleanroom operations and safety protocols.
• Experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps.
• Skilled in troubleshooting 208V electrical systems and 24V control subsystems.
• Experience with RF power components and pneumatically driven diagnostics & tools.
• Proficient with diagnostic instruments: vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters, megohm meters.
• Ability to read and interpret mechanical, pneumatic, electrical schematics and plumbing diagrams.
• Strong understanding of RF theory and inductively coupled plasma (ICP) systems.
• Familiarity with semiconductor processes: RIE, PECVD, ICP, ALD.

Responsibilities

• Lead installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD) with full compliance to specifications and cleanroom standards.
• Execute scheduled and emergency maintenance; diagnose root causes and validate repairs against vacuum tolerances and process benchmarks.
• Build trust with customers through responsive communication and hands-on training on key processes.
• Resolve complex hardware and software issues using specialized tools; provide remote support to minimize downtime.
• Calibrate components and implement upgrades (turbo pumps, PLCs, breakers) to improve reliability and throughput.

Skills

RF theory

ICP systems

Diagnostics tools

Cleanroom operations

Travel readiness

Communication skills

Education

Bachelor’s degree in EE/ME/Physics

Equivalent hands-on semiconductor service experience

Tools

Vacuum leak detectors

RF power meters

DVMs

LCR meters

Multimeters

Megohm meters

Turbo/cryopumps

MKS components

Job description

Oxford Instruments plc seeks an experienced Senior onsite Field Service Engineer to support High Volume Manufacturing (HVM) semiconductor customers. You will lead installation, preventive and corrective maintenance, and on-site training to maximize uptime and production.

The role requires 3–5 years in semiconductor equipment service, strong RF/ICP knowledge, and ability to travel extensively Monday through Friday.