Field Service Engineer

Oxford Instruments; Concord (NH); On-site; USD 95,000 - 115,000; Full time

Job summary

Oxford Instruments is seeking a senior onsite technical expert to support High Volume Manufacturing semiconductor customers, delivering installation, preventive and corrective maintenance, and hands‑on process support to maximize uptime. This role requires strong troubleshooting, customer engagement, and training capabilities, with travel across sites.

A Bachelor's degree in engineering or physics and 3–5 years field service experience are preferred, along with cleanroom familiarity.

Qualifications

• Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field; hands‑on semiconductor equipment service may substitute.
• 3–5 years of field service experience in semiconductor industry, with focus on plasma etch and deposition systems.
• Familiarity with cleanroom operations and safety protocols.

Responsibilities

• Lead system installation & commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD).
• Perform preventive and corrective maintenance, diagnose root causes, and validate repairs to meet vacuum tolerances and process benchmarks.
• Provide customer training, build long‑term relationships, and enable operators to manage systems confidently across processes.
• Resolve hardware and software issues using specialized tools; provide remote support to minimize downtime.
• Calibrate components and implement upgrades (turbo pumps, PLCs, breakers) to enhance reliability and throughput.

Skills

Customer-facing leadership

Troubleshooting

Field service

Technical training

Communication

Education

Bachelor's degree in engineering/physics

Tools

Vacuum leak detectors

RF power meters

DVMs

LCR meters

Multimeters

Job description

The Role:

Represent Oxford Instruments as the senior onsite technical expert supporting High Volume Manufacturing (HVM) semiconductor customers. Deliver installation, preventive maintenance, corrective maintenance, troubleshooting, process support, customer training, and operational partnership to maximize uptime and production.

Key Responsibilities:

• System Installation & Commissioning: Lead the installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD), ensuring full compliance with customer specifications, cleanroom standards, and process readiness.
• Preventive & Corrective Maintenance: Execute scheduled and emergency maintenance with precision. Diagnose root causes beyond surface-level symptoms and validate repairs against stringent vacuum tolerances, leak‑up rates, and process benchmarks.
• Customer Engagement & Technical Training: Build trust and long‑term relationships through responsive communication and hands‑on training. Empower customers to operate and maintain systems confidently across key processes.
• Advanced Troubleshooting: Resolve complex hardware, and software issues using specialized tools (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters). Provide remote support when needed to minimize downtime and maximize uptime.
• Calibration & System Upgrades: Calibrate critical components (AMUs, RF Generators, APCs, MFCs) and implement performance‑enhancing upgrades (turbo pumps, PLCs, breakers) to ensure optimal system reliability and throughput.

Education & Experience

Education & Industry Background

Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field. Equivalent hands‑on experience in semiconductor equipment service may substitute. 3–5 years of field service experience in the semiconductor industry, with a focus on plasma etch and deposition systems. Familiarity with cleanroom operations and safety protocols.

Vacuum & Power Systems

Hands‑on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps. Skilled in troubleshooting 208V electrical systems and 24V control subsystems. Experience with RF power components and pneumatically driven.

Diagnostics & Technical Tools

Vacuum leak detectors RF power meters DVMs, LCR meters, multimeters. Proficient with diagnostic instruments. Ability to read and interpret mechanical, pneumatic, and electrical schematics and plumbing diagrams.

Process Knowledge

Strong understanding of RF theory and inductively coupled plasma (ICP) systems. Familiarity with semiconductor processes: RIE, PECVD, ICP, ALD.

Physical & Travel Requirements

Hold a valid driver’s license and safe driving record, passport, and ability to travel independently. Must be physically agile and comfortable working in confined or awkward spaces. Capable of independently lifting and handling equipment weighing up to 50 lbs. Able to commit to extensive weekday travel to support customer installations and service needs, Monday through Friday.

Preferred Skills & Attributes

• Platform & Component Experience; Experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components. Knowledge of calibration and optimization of APCs and MFCs.
• Work Ethic & Collaboration; Strong manual dexterity and ability to maintain a clean, organized workspace in cleanroom attire. Proactive problem‑solving and openness to continuous learning. Effective communicator with strong listening skills. adaptable to evolving technologies.

What Sets You Apart:

Commitment to Service Excellence; Passion for solving complex technical challenges; proactive in anticipating customer needs and delivering timely, high-quality solutions.

Additional HVM Responsibilities:

dedicated senior engineer supporting customer production operations (8:00 AM–5:00 PM); drive uptime; support tool installations, qualifications, and production ramp activities; mentor junior Field Service Engineers; participate in reviews.

Preferred Experience:

3+ years supporting semiconductor capital equipment in HVM environments; strong customer‑facing leadership.

Compensation:

The expected salary for this full‑time, benefited position is between $95,000 - $115,000.