Field Service Engineer I

Oxford Instruments; Concord (MA); On-site; USD 90,000 - 110,000; Full time

Job summary

A leading technology firm seeks a Field Service Engineer I for plasma technology support across North America. This role requires 3-5 years of semiconductor field service experience and hands-on problem-solving skills. The candidate will lead installations, conduct maintenance, and provide technical training while managing travel demands. The compensation is expected to range from $90,000 to $110,000, reflective of the candidate’s experience and skills.

Qualifications

• 3-5 years of field service experience in semiconductor equipment, working with plasma etch and deposition systems.
• Familiarity with cleanroom operations and safety protocols.
• Holds a valid driver’s license and can travel independently.

Responsibilities

• Lead installation and commissioning of plasma etch and deposition systems.
• Execute scheduled and emergency maintenance with precision.
• Build long-term relationships through responsive communication and training.
• Resolve complex hardware/software issues and provide remote support.
• Calibrate components and implement performance upgrades.

Skills

Vacuum technologies

Troubleshooting electrical systems

Diagnostic instruments usage

RF theory

Education

Bachelor’s degree in Electrical or Mechanical Engineering

Equivalent hands-on experience

Tools

Vacuum leak detectors

RF power meters

Multimeters

Job description

Field Service Engineer I

Field Service Engineer - Plasma Technology

About Oxford Instruments

Our purpose is to accelerate the breakthroughs that create a brighter future for our world. Our technology and scientific expertise enable our customers to discover and bring to market exciting new advances that drive human progress. We aim to be the scientific instrumentation partner in every significant lab and production facility across the world

Location

REMOTE - North America -based - Northeasten, USA. Candidates must reside within reasonable travel time (typically 60 minutes) of a major airport to support frequent weekday travel to customer sites.

The Role

Represent Oxford Instruments by delivering world-class technical support, installation, and maintenance for plasma etch and deposition systems (e.g., PlasmaPro, FlexAL, Estrelas etcher). This role demands a hands‑on problem solver with strong technical acumen, clear communication skills, and a proactive mindset. You'll collaborate across teams, elevate issues when needed, and maintain detailed documentation to support continuous improvement. With extensive travel across customer sites, you'll play a critical role in driving customer satisfaction and advancing cutting‑edge semiconductor technologies.

Key Responsibilities

• System Installation & Commissioning – Lead the installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD), ensuring full compliance with customer specifications, cleanroom standards, and process readiness.
• Preventive & Corrective Maintenance – Execute scheduled and emergency maintenance with precision. Diagnose root causes beyond surface‑level symptoms and validate repairs against stringent vacuum tolerances, leak‑up rates, and process benchmarks.
• Customer Engagement & Technical Training – Build trust and long‑term relationships through responsive communication and hands‑on training. Empower customers to operate and maintain systems confidently across key processes.
• Advanced Troubleshooting – Resolve complex hardware and software issues using specialized tools (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters). Provide remote support when needed to minimize downtime and maximize uptime.
• Calibration & System Upgrades – Calibrate critical components (AMUs, RF generators, APCs, MFCs) and implement performance‑enhancing upgrades (turbo pumps, PLCs, breakers) to ensure optimal system reliability and throughput.

Required Qualifications & Experience

• Education & Industry Background
  • Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field.
  • Equivalent hands‑on experience in semiconductor equipment service may substitute.
  • 3‑5 years of field service experience in the semiconductor industry, with a focus on plasma etch and deposition systems.
  • Familiarity with cleanroom operations and safety protocols.
• Vacuum & Power Systems
  • Hands‑on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps.
  • Skilled in troubleshooting 208V electrical systems and 24V control subsystems.
• Diagnostics & Technical Tools
  • Proficient with diagnostic instruments: vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters, megohm meters.
  • Ability to read and interpret mechanical, pneumatic, and electrical schematics and plumbing diagrams.
• Process Knowledge
  • Strong understanding of RF theory and inductively coupled plasma (ICP) systems.
  • Familiarity with semiconductor processes: RIE, PECVD, ICP, ALD.
• Physical & Travel Requirements
  • Hold a valid driver’s license and safe driving record, passport, and ability to travel independently.
  • Must be physically agile and comfortable working in confined or awkward spaces.
  • Capable of independently lifting and handling equipment weighing up to 50 lbs.
  • Able to commit to extensive weekday travel to support customer installations and service needs, Monday through Friday.

Preferred Skills & Attributes

• Platform & Component Experience
  • Experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components.
  • Knowledge of calibration and optimization of APCs and MFCs.
• Work Ethic & Collaboration
  • Strong manual dexterity and ability to maintain a clean, organized workspace in cleanroom attire.
  • Proactive problem‑solving and openness to continuous learning.
  • Effective communicator with strong listening skills.
  • Adaptable to evolving technologies and customer needs.
  • Comfortable working independently or as part of a team.
• What Sets You Apart: Commitment to Service Excellence
  • Passion for solving complex technical challenges with precision and care.
  • Proactive in anticipating customer needs and delivering timely, high‑quality solutions.
  • Builds trust through clear communication and confident issue resolution.
  • Eager to learn, grow, and collaborate to uphold the highest standards of service.

Compensation

In accordance with Massachusetts law, the expected salary for this full‑time, benefited position is between $90,000 – $110,000. The actual compensation will be determined considering factors such as relevant skills and experience and other factors permitted by law.