Field Service Engineer I (PT)

Oxford Instruments; Chicago (IL); On-site; USD 75,000 - 90,000; Full time

Job summary

Oxford Instruments is looking for a skilled technical support individual to provide installation and maintenance for plasma etch and deposition systems. Based in Chicago, this role involves frequent travel to customer sites and demanding problem-solving with a strong emphasis on technical skills.

The ideal candidate has a bachelor’s degree in engineering and extensive experience in the semiconductor industry. We offer competitive compensation and opportunities for professional growth.

Qualifications

• 3-5 years field service experience in the semiconductor industry focusing on plasma etch and deposition systems.
• Hands-on experience with vacuum technologies and electrical troubleshooting.
• Ability to travel independently and work in confined spaces.

Responsibilities

• Lead the installation and commissioning of plasma etch and deposition systems.
• Execute scheduled and emergency maintenance with precision.
• Build trust and relationships through training and communication.
• Resolve hardware and software issues to minimize downtime.
• Calibrate components and implement performance-enhancing upgrades.

Skills

Vacuum technologies

208V electrical systems

RF theory

Inductively coupled plasma systems

Education

Bachelor’s degree in electrical/mechanical engineering, physics or related

Tools

Vacuum leak detectors

RF power meters

Job description

Overview

Our purpose is to accelerate the breakthroughs that create a brighter future for our world. Our technology and scientific expertise enable our customers to discover and bring to market exciting new advances that drive human progress. We aim to be the scientific instrumentation partner in every significant lab and production facility across the world.

Location

REMOTE – North America – Midwest (Chicago, USA). Candidates must reside within reasonable travel time (typically 60 minutes) of a major airport to support frequent weekday travel to customer sites.

The Role

Represent Oxford Instruments by delivering world‑class technical support, installation, and maintenance for plasma etch and deposition systems (e.g., PlasmaPro, FlexAL, Estrelas etcher). This role demands a hands‑on problem solver with strong technical acumen, clear communication skills, and a proactive mindset. You’ll collaborate across teams, elevate issues when needed, and maintain detailed documentation to support continuous improvement. With extensive travel across customer sites, you’ll play a critical role in driving customer satisfaction and advancing cutting‑edge semiconductor technologies.

Key Responsibilities

• System Installation & Commissioning: lead the installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD), ensuring full compliance with customer specifications, cleanroom standards, and process readiness.
• Preventive & Corrective Maintenance: execute scheduled and emergency maintenance with precision, diagnose root causes beyond surface symptoms, and validate repairs against stringent vacuum tolerances, leak‑up rates, and process benchmarks.
• Customer Engagement & Technical Training: build trust and long‑term relationships through responsive communication and hands‑on training, empowering customers to operate and maintain systems confidently across key processes.
• Advanced Troubleshooting: resolve complex hardware and software issues using specialized tools (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters), providing remote support when needed to minimize downtime and maximize uptime.
• Calibration & System Upgrades: calibrate critical components (AMUs, RF generators, APCs, MFCs) and implement performance‑enhancing upgrades (turbo pumps, PLCs, breakers) to ensure optimal system reliability and throughput.

Required Qualifications & Experience

• Education & Industry Background: bachelor’s degree in electrical engineering, mechanical engineering, physics, or a related technical field; equivalent hands‑on experience in semiconductor equipment service may substitute; 3–5 years field service experience in the semiconductor industry with focus on plasma etch and deposition systems; familiarity with cleanroom operations and safety protocols.
• Vacuum & Power Systems: hands‑on experience with vacuum technologies (turbo pumps, cryo pumps, roughing pumps); skilled in troubleshooting 208V electrical systems and 24V control subsystems.
• Diagnostics & Technical Tools: proficient with diagnostic instruments including vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters, and megohm meters.
• Process Knowledge: strong understanding of RF theory and inductively coupled plasma (ICP) systems; familiarity with semiconductor processes such as RIE, PECVD, ICP, and ALD.
• Physical & Travel Requirements: holds a valid driver’s license and safe driving record, passport, and the ability to travel independently; physically agile and comfortable working in confined or awkward spaces; capable of independently lifting and handling equipment weighing up to 50 lbs; able to commit to extensive weekday travel to support customer installations and service needs, Monday through Friday.

Preferred Skills & Attributes

• Platform & Component Experience: experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components; knowledge of calibration and optimization of APCs and MFCs.
• Work Ethic & Collaboration: strong manual dexterity and ability to maintain a clean, organized workspace in cleanroom attire; proactive problem‑solving and openness to continuous learning; effective communicator with strong listening skills; adaptable to evolving technologies and customer needs; comfortable working independently or as part of a team.
• Commitment to Service Excellence: passion for solving complex technical challenges with precision and care; proactive in anticipating customer needs and delivering timely, high‑quality solutions; builds trust through clear communication and confident issue resolution; eager to learn, grow, and collaborate to uphold the highest standards of service.

Compensation

In accordance with Massachusetts law, the expected salary for this full‑time, benefited position is between $75,000 and $90,000. The actual compensation will be determined considering relevant skills and experience and other factors permitted by law.