Senior Research Engineer, CMP (FAB), IME

A*STAR - Agency for Science, Technology and Research; Singapore; On-site; SGD 70,000 - 90,000; Full time

Job summary

A*STAR - Agency for Science, Technology and Research in Singapore is looking for a CMP Engineer to support semiconductor research. This role involves operational engineering control of CMP platforms, ensuring process robustness, scalability, and collaboration with industry partners.

The ideal candidate will have a relevant Bachelor’s degree, 3–5 years of experience in CMP processes, and a strong understanding of process control frameworks. Skills in data analysis tools and effective communication across teams are essential.

Qualifications

• 3–5 years of experience in CMP processes, ideally in semiconductor manufacturing.
• Strong understanding of CMP fundamentals, including material removal mechanisms.
• Experience in operations-focused engineering with a proficiency in data analysis tools.

Responsibilities

• Own day-to-day operational engineering control of CMP processes.
• Establish and maintain process control frameworks.
• Monitor and control CMP KPIs and perform troubleshooting.

Skills

CMP processes

Data analysis (JMP, Python, Excel)

Process control (SPC, DOE)

Hands-on experience with CMP platforms

Communication skills

Education

Bachelor’s or higher in Chemical Engineering, Materials Science, or related

Job description

The CMP Engineer supports translational semiconductor research by bridging advanced material integration and planarization process development with industry‑relevant manufacturing practices. The role focuses on operational engineering control of CMP platforms within a research fab or pilot line environment, ensuring process robustness, repeatability and scalability for transfer to industrial partners.

Roles & Responsibilities

• CMP Operations & Process Control
• Own day‑to‑day operational engineering control of CMP processes in research, pilot, or pre‑production environments.
• Establish and maintain process control frameworks (SPC, control plans, excursion management, process limits) that balance research flexibility with manufacturing discipline.
• Monitor and control CMP KPIs including removal rate, within‑wafer non‑uniformity (WIWNU), within‑lot variation, planarity, defectivity (scratches, particles), and dishing/erosion.
• Perform rapid troubleshooting, root‑cause analysis, and corrective actions to maintain tool uptime and experimental reliability.
• Translational Research Enablement
• Enable research‑to‑manufacturing transition by ensuring CMP processes are scalable, stable, and integration‑ready.
• Support co‑developed experiments with industry partners, including advanced patterning stacks and multi‑layer integration schemes.
• Provide engineering guidance to researchers on process trade‑offs involving planarity, selectivity, and integration complexity.
• Tool Performance, Process Setup & Capability Development
• Support CMP tool qualification, baseline setup, and process matching across platforms and modules.
• Collaborate with Equipment Engineering and vendors on platen/head performance, slurry delivery systems, pad conditioning, and hardware optimization.
• Support introduction of new consumables (slurries, pads, conditioners), tool upgrades, and experimental configurations with appropriate risk assessment.
• Process Sustainment, Data Analysis & Improvement
• Sustain qualified CMP processes while enabling controlled experimentation through process window characterization and drift monitoring.
• Analyze experimental and inline metrology data (e.g., thickness, topography, defect inspection) to identify systematic trends and yield limiters.
• Drive continuous improvement initiatives to enhance planarity performance, defect reduction, process stability, and throughput.
• Industry Collaboration & Technology Transfer
• Work closely with industry partners to align CMP processes, consumables, and integration strategies with manufacturing requirements.
• Support technology transfer activities including process documentation, baseline definition, and readiness assessment for partner fabs.
• Participate in technical reviews, cross‑functional meetings, and joint problem‑solving efforts with internal teams and external collaborators.
• Documentation, Governance & Knowledge Sharing
• Maintain comprehensive process documentation, standard operating procedures, and experimental run plans.
• Generate clear engineering reports summarizing process performance, integration risks, and recommendations.
• Contribute to best practices for CMP module operation within research and industry‑engaged programs.

Required Qualifications

• Bachelor’s degree or higher in Chemical Engineering, Materials Science, Mechanical Engineering, Electrical Engineering, or related disciplines.
• 3–5 years of experience in CMP processes, ideally in semiconductor manufacturing, pilot lines, or applied R&D environments.
• Strong understanding of CMP fundamentals: material removal mechanisms, slurry chemistry, pad behavior, selectivity, and defect control.
• Experience in process control (SPC, DOE, excursion management) and operations‑focused engineering.
• Proficiency in data analysis tools (e.g., JMP, Python, Excel).

Preferred / Added Advantages

• Hands‑on experience with advanced CMP platforms (e.g., multi‑platen tools, integrated metrology).
• Familiarity with advanced node integration challenges (e.g., STI, FinFET, GAA, BEOL planarization).
• Experience working with slurry and pad suppliers, consumable qualification, and co‑optimization.
• Knowledge/Experience of AFM metrology.
• Exposure to industry–research collaborations, JDPs, or technology transfer projects.
• Strong communication skills across research, engineering, and industry stakeholders.

Key Attributes for Success

• Strong integration and manufacturing mindset in a research environment.
• Ability to balance process discipline with experimental agility.
• Structured, data‑driven problem‑solving approach.
• Collaborative and industry‑oriented mindset.
• High ownership and reliability in cross‑functional, high‑visibility programs.