Senior Research Engineer, Metrology Eng Ops (FAB), IME

A*STAR - Agency for Science, Technology and Research; Singapore; On-site; SGD 60,000 - 90,000; Full time

Job summary

A*STAR - Agency for Science, Technology and Research seeks a Metrology Engineer to support semiconductor research. The position focuses on operational engineering control of critical metrology platforms.

The candidate should have a Bachelor’s degree in relevant fields and 3–5 years of semiconductor metrology experience, ensuring measurement accuracy and enabling process control. Strong analytical skills and proficiency in data analysis tools are essential.

Qualifications

• Bachelor's degree or higher in relevant fields.
• 3–5 years of experience in semiconductor metrology.
• Strong understanding of measurement fundamentals.
• Experience in SPC and process control methodologies.
• Proficiency in data analysis tools.

Responsibilities

• Own day-to-day engineering control of metrology systems.
• Establish and maintain measurement control frameworks.
• Monitor and control key metrology KPIs.
• Enable research-to-manufacturing transition.
• Lead tool qualification and capability development.

Skills

CDSEM operation

DRSEM operation

AFM operation

Measurement data analysis

SPC

Python

JMP

Education

Bachelor's degree in Electrical Engineering

Bachelor's degree in Materials Science

Bachelor's degree in Physics

Bachelor's degree in Nanotechnology

Tools

CDSEM

DRSEM

AFM

Excel

Job description

Job Summary

The Metrology Engineer (DRSEM / CDSEM / AFM) supports translational semiconductor research by bridging advanced metrology development with industry‑relevant manufacturing practices. The role focuses on operational engineering control of critical dimension and surface metrology platforms within a research fab or pilot line environment. The engineer ensures measurement accuracy, repeatability, and data integrity to enable process control, yield learning, and scalability for technology transfer to industrial partners. This position plays a key role in supporting process development, patterning validation, and defect characterization across joint development programs (JDPs) and industry collaborations.

Roles & Responsibilities

• Metrology Operations & Measurement Control
• Own day‑to‑day operational engineering control of DRSEM, CDSEM, and AFM metrology systems.
• Establish and maintain measurement control frameworks e.g. SPC, recipe control, calibration plans, tool matching.
• Monitor and control key metrology KPIs including CD accuracy, precision, repeatability & reproducibility, tool matching, drift, and measurement uncertainty.
• Ensure high tool uptime and data reliability through proactive troubleshooting and maintenance coordination.
• Translational Research Enablement
• Enable research‑to‑manufacturing transition by ensuring metrology methods are robust, standardized, and transferable.
• Support advanced process development by providing accurate measurement of critical features like CD, profile, roughness, step height.
• Collaborate with process engineers to define measurement strategies aligned with integration requirements and manufacturing constraints.
• Tool Qualification, Matching & Capability Development
• Lead tool qualification, baseline setup, and recipe optimization for new and existing metrology platforms.
• Perform tool matching and correlation studies across multiple CDSEM, DRSEM, AFM systems.
• Collaborate with Equipment Engineering and vendors on system calibration, imaging performance, and hardware improvements.
• Support introduction of new metrology tools, upgrades, and advanced measurement techniques.
• Data Analysis, Modeling & Improvement
• Analyze metrology data to identify systematic trends, variation sources, and process‑induced deviations.
• Develop and refine measurement algorithms, sampling plans, and data interpretation methodologies.
• Support correlation between inline metrology and electrical or structural data to identify yield limiters.
• Drive continuous improvement in measurement accuracy, throughput, and automation.
• Industry Collaboration & Technology Transfer
• Align metrology methodologies, KPIs, and reporting formats with semiconductor industry partners.
• Support technology transfer activities, including recipe porting, baseline definition, and cross‑site correlation.
• Participate in technical reviews and joint problem‑solving with internal teams and external collaborators.
• Documentation, Governance & Knowledge Sharing
• Maintain high‑quality documentation for measurement recipes, calibration procedures, and control plans.
• Generate clear reports on metrology performance, correlation studies, and process insights.
• Contribute to best practices for metrology operations within research fab and industry‑facing programs.

Required Qualifications

• Bachelor’s degree or higher in Electrical Engineering, Materials Science, Physics, Nanotechnology, or related disciplines.
• 3–5 years of experience in semiconductor metrology, with hands‑on experience in CDSEM, DRSEM, and or AFM.
• Strong understanding of measurement fundamentals: CD extraction, imaging physics, AFM tip‑sample interaction, and error sources.
• Experience in SPC, measurement system analysis (MSA), GR&R, and process control methodologies.
• Proficiency in data analysis tools e.g., JMP, Python, Excel.

Preferred / Added Advantages

• Experience with advanced nodes e.g., EUV patterning, FinFET, GAA, advanced memory.
• Familiarity with pattern fidelity challenges such as LER, LWR, stochastic defects, and high‑aspect‑ratio structures.
• Experience in multi‑tool correlation, reference standards, and metrology integration into process control loops.
• Exposure to industry–research collaborations, JDPs, or technology transfer programs.
• Strong cross‑functional communication skills with process, equipment, and integration teams.

Key Attributes for Success

• Strong data‑centric and precision‑driven mindset
• Ability to balance metrology rigor with research flexibility
• Structured, analytical problem solving
• Collaborative and industry‑oriented approach
• High ownership in ensuring measurement integrity and reliability