Vacuum Systems Engineer — EUV Gas Flow & Cleanliness

ASML US, LLC; Wilton (CT); Hybrid; USD 120,000 - 180,000; Full time

Benefits offered by this job

Medical, dental, vision insurance

401k plan

Paid vacation and holidays

Job summary

ASML US, LLC in Wilton, Connecticut is seeking a Vacuum Systems Engineer to join the Defectivity MDU. You will design gas-flow and vacuum architectures for scanners and test rigs, specify components, and model performance to meet cleanliness and reliability targets.

You will lead cross-functional reviews, perform DOEs and experiments, and transfer vacuum knowledge across ASML units while following safety standards.

Qualifications

• BS degree in a technical field required; MS/PhD preferred depending on scope.
• Solid theoretical and practical experience with vacuum and gas-flow phenomena in semiconductor environments.
• Internal candidates familiar with Twinscan and ASML vacuum systems will be prioritized.

Responsibilities

• Translate system design into a gas-flow and vacuum architecture meeting requirements.
• Specify vacuum system components, standards and procedures with proper documentation.
• Define, model and execute qualification tests to verify architecture performance.
• Support particle contamination issue resolution via flushing/venting procedures.
• Lead design reviews for test rigs and assist integration of architectures.
• Perform DOEs for degassing chambers and components at product/process levels.
• Transfer vacuum systems knowledge between ASML units and delivery teams.

Skills

Vacuum systems

Gas-flow architecture

Contamination control

Modeling & testing

Documentation

Technical writing

Vacuum measurement

Communication

Education

BS in a technical field

MS/PhD preferred

Job description

ASML US, LLC in Wilton, Connecticut is seeking a Vacuum Systems Engineer to join the Defectivity MDU. You will design gas-flow and vacuum architectures for scanners and test rigs, specify components, and model performance to meet cleanliness and reliability targets.

You will lead cross-functional reviews, perform DOEs and experiments, and transfer vacuum knowledge across ASML units while following safety standards.