EUV Vacuum Systems Engineer — Hybrid/On‑Site (Wilton, CT)

ASML Germany GmbH; Wilton (CT); On-site; USD 120,000 - 180,000; Full time

Job summary

ASML is seeking a Vacuum Systems Engineer for its Wilton, Connecticut location to design and deliver contamination-free vacuum environments for EUV lithography systems. You will specify gas-flow architectures, pump-down/vent procedures and contribute to hardware projects with cross-functional teams.

You will model flow, perform tests, document results, and share expertise across ASML sites, supporting machine conditioning architecture and valve and barrier strategies in scanners and test rigs.

Qualifications

• BS in a technical field with 5+ years experience for JG08 or 9+ years for JG09.
• Strong vacuum and gas-flow knowledge for scanners and test rigs.
• Internal candidates familiar with Twinscan and vacuum systems ADT will be prioritized.

Responsibilities

• Specify vacuum systems, gas flows, pump-down and vent procedures.
• Document standards, procedures and component specs in Technical Product Documentation.
• Define, model, and execute qualification tests to verify architecture and performance.
• Support resolution of particle contamination with flushing and venting strategies.
• Lead design reviews for test rigs and support integration of architectures.
• Conduct DOEs for degassing chambers and components across product and process levels.
• Provide vacuum-cleanliness support and practical recommendations from analysis.
• Transfer vacuum systems knowledge between ASML units and delivery teams.

Skills

Vacuum systems

Gas-flow design

Contamination control

Analysis & testing

Documentation

Modeling & simulation

Vacuum measurement

Technical writing

Education

BS degree in a technical field

MS or PhD preferred

Tools

RGA

Simulation tools

Job description

ASML is seeking a Vacuum Systems Engineer for its Wilton, Connecticut location to design and deliver contamination-free vacuum environments for EUV lithography systems. You will specify gas-flow architectures, pump-down/vent procedures and contribute to hardware projects with cross-functional teams.

You will model flow, perform tests, document results, and share expertise across ASML sites, supporting machine conditioning architecture and valve and barrier strategies in scanners and test rigs.