On-site Vacuum Systems Engineer – EUV & Contamination

ASML Germany GmbH; Wilton (CT); On-site; USD 120,000 - 180,000; Full time

Benefits offered by this job

Medical, dental, vision insurance

401k plan

Paid time off and holidays

Job summary

ASML in Wilton, Connecticut is seeking a Vacuum Systems Engineer to own vacuum and gas-flow architectures for EUV lithography equipment. You will model gas flows, select materials, and develop cleanliness processes to sustain vacuum performance in scanner environments.

This role interfaces with D&E delivery teams and cross-site engineers in a fast-paced product development setting. You will lead tests, document procedures, and mentor others while delivering reliable, contamination-free vacuum

Qualifications

• Bachelor's degree in a technical field required; master's or PhD preferred depending on scope.
• Solid theory and practical experience with vacuum and gas-flow phenomena, semiconductor context preferred.
• Internal candidates with Twinscan/vacuum systems ADT knowledge are favored.

Responsibilities

• Specify vacuum systems and gas flows for scanners and test rigs.
• Document standards and procedures in Technical Product Documentation.
• Define and execute qualification tests to verify architecture performance.
• Support particle contamination resolution via flushing and venting procedures.
• Define pump-down and vent procedures to ensure flow performance.
• Lead design reviews for test rigs and ensure integration across subsystems.
• Design experiments for degassing chambers and components at product level.
• Provide vacuum cleanliness support and data-driven recommendations.

Skills

Vacuum systems

Gas-flow architecture

Contamination control

Modeling and testing

Technical writing

Education

BS degree in a technical field

MS/PhD preferred

Tools

TwinScan familiarity

Vacuum-system flow modeling

Job description

ASML in Wilton, Connecticut is seeking a Vacuum Systems Engineer to own vacuum and gas-flow architectures for EUV lithography equipment. You will model gas flows, select materials, and develop cleanliness processes to sustain vacuum performance in scanner environments.

This role interfaces with D&E delivery teams and cross-site engineers in a fast-paced product development setting. You will lead tests, document procedures, and mentor others while delivering reliable, contamination-free vacuum