EUV Vacuum Systems Engineer — Contamination Control

ASML US, LLC; Wilton (CT); On-site; USD 120,000 - 155,000; Full time

Job summary

ASML US, LLC in Wilton, CT seeks a Vacuum Systems Engineer to design and optimize vacuum environments for EUV lithography scanners and test rigs. You will model gas flows, select materials, and contribute to contamination control to support wafer yield and machine availability.

The role involves cross-functional collaboration with D&E, architecture teams, and ASML sites, with on-site responsibilities in Wilton and occasional US/international travel.

Qualifications

• BS in a technical field and 5+ years of thorough experience; MS or PhD preferred.
• Solid theoretical and practical vacuum and gas-flow knowledge, preferably in semiconductor environments.
• Internal candidates with Twinscan and vacuum system experience prioritized.

Responsibilities

• Translate system design into a gas-flow and vacuum architecture meeting requirements.
• Specify vacuum components, standards, and document in Technical Product Documentation.
• Define and execute qualification tests to verify architecture and performance.
• Address particle contamination via flushing/venting procedure specifications.
• Define pump-down and vent procedures for consistent flow performance.
• Participate in design reviews for test rigs and enable architecture integration.
• Design experiments for degassing chambers at product and process levels.
• Provide vacuum cleanliness support and actionable recommendations from analysis.
• Transfer vacuum systems knowledge across ASML units and delivery teams.
• Perform pressure-drop budgeting, flow budgeting, humidification, and gas purity analyses.
• Follow system architects and mentors; identify and mitigate safety risks.

Skills

Vacuum systems

Gas-flow architecture

Documentation standards

DOE testing

Flow budgeting

Surface cleanliness

Education

BS degree in a technical field

MS or PhD preferred

Job description

ASML US, LLC in Wilton, CT seeks a Vacuum Systems Engineer to design and optimize vacuum environments for EUV lithography scanners and test rigs. You will model gas flows, select materials, and contribute to contamination control to support wafer yield and machine availability.

The role involves cross-functional collaboration with D&E, architecture teams, and ASML sites, with on-site responsibilities in Wilton and occasional US/international travel.