Senior Principal Engineer, Heaters & ESC Innovation

ASM; Phoenix (AZ); On-site; USD 140,000 - 180,000; Full time

Job summary

ASM is seeking an (Senior) Principal Engineer for Heaters and ESC to lead hardware design and delivery of ESC and heater solutions for 300mm wafer processing. The role emphasizes innovative technology development over legacy approaches.

The candidate will drive selection of dielectric materials, define performance specifications, and collaborate across functions to ensure reliable, high-precision temperature control and thermal management in vacuum process chambers.

Qualifications

• Master's degree or PhD in Materials Science, Ceramic Engineering, or related discipline.
• 7+ years of experience in semiconductor capital equipment engineering, with exposure to ESC or heater technologies.
• Experience with 300mm wafer processing tools and OEM component qualification processes.

Responsibilities

• Design and develop Johnsen-Rahbek (JR) and Coulombic-type ESC assemblies for 300mm wafer processing applications.
• Select and qualify dielectric materials (alumina, AlN, Y2O3) for ESC ceramic layers based on electrical, thermal and chemical compatibility requirements.
• Define ESC clamping voltage, leakage current, and chucking/dechucking performance specifications.
• Characterize ESC electrical properties including volume resistivity, dielectric constant, and breakdown voltage across process temperature ranges.
• Analyze wafer backside contamination, particle generation, and arcing risks associated with ESC operation.
• Support ESC integration with RF bias and DC chucking power supplies in plasma processing chambers.
• Design multi-zone embedded heater assemblies for uniform wafer temperature distribution across process temperatures (room temperature to 700°C+).
• Perform thermal modeling and simulation (FEA) to optimize heater layout, power density, and zone configuration.
• Develop and validate closed-loop temperature control systems including sensor selection and PID tuning.

Skills

Analytical thinking

Problem-solving

Communication

Cross-functional teamwork

Thermal management

Education

Master's or PhD in Materials Science or Ceramic Engineering

Tools

LCR meters

High-voltage testers

Curve tracers

ANSYS

COMSOL

Job description

ASM is seeking an (Senior) Principal Engineer for Heaters and ESC to lead hardware design and delivery of ESC and heater solutions for 300mm wafer processing. The role emphasizes innovative technology development over legacy approaches.

The candidate will drive selection of dielectric materials, define performance specifications, and collaborate across functions to ensure reliable, high-precision temperature control and thermal management in vacuum process chambers.