Director / MTS, Heaters and Electrostatic Chuck (ESC)

ASM International; Phoenix (AZ); On-site; USD 180,000 - 240,000; Full time

Job summary

ASM International is seeking a Director/MTS for Heaters and Electrostatic Chuck (ESC) to lead the design and delivery of advanced ESC and heater hardware solutions for 300mm wafer processing. You will develop innovative ceramic and dielectric systems, define performance specs, and drive integration with plasma processing tools in a cross-functional team.

The role requires a Master’s or PhD in Materials Science or related field, 10+ years in semiconductor capital equipment engineering, and strong

Qualifications

• Master's degree or PhD in Materials Science, Ceramic Engineering, or related discipline.
• 10+ years of experience in semiconductor capital equipment engineering, with direct exposure to ESC or heater technologies.
• Experience with 300mm wafer processing tools and OEM component qualification processes.
• Knowledge of high-purity ceramic fabrication techniques (sintering, plasma spray, anodization).
• Familiarity with reactive process chemistries (fluorine, chlorine plasmas) and their impact on ESC/heater materials.
• Solid understanding of electrostatic clamping mechanisms (Coulombic and JR force models) and their process dependencies.
• Experience with ceramic materials and thin-film dielectric systems used in semiconductor equipment.
• Familiarity with thermal management in vacuum environments, including radiation, conduction, and convection heat transfer.
• Hands-on experience with electrical characterization equipment (LCR meters, high-voltage testers, curve tracers).
• Knowledge of plasma processing systems (etch, CVD, PVD, or ALD) and their requirements for ESC performance.
• Experience with FEA thermal simulation tools (ANSYS, COMSOL, or equivalent).
• Strong analytical and problem-solving ability with a systematic approach to failure analysis.
• Effective communication skills and ability to work in cross-functional teams.

Responsibilities

• Design and deliver hardware engineering solutions for ESC and heaters.
• Develop JR and Coulombic ESC assemblies for 300mm wafer processing.
• Select and qualify dielectric materials for ESC ceramics.
• Define clamping voltage, leakage current, and chucking performance specs.
• Characterize ESC electrical properties across temperature ranges.
• Mitigate wafer backside contamination and arcing risks.
• Integrate ESC with RF bias and DC chucking in plasma chambers.
• Design multi-zone heater assemblies for uniform wafer temps to 700C+.
• Perform thermal modeling to optimize heater layout and power density.
• Develop closed-loop temperature control systems with sensors and PID tuning.
• Validate heater uniformity and thermal response via mapping tools.
• Manage thermal stress and CTE mismatch for reliability.

Skills

Master's degree or PhD in Materials/相关

Project leadership

Cross-functional collaboration

Analytical thinking

Technical communication

Problem solving

Thermal management

Failure analysis

RF bias integration

Electrical characterization

Education

Master's or PhD in Materials Science / Ceramic Engineering

Tools

ANSYS / COMSOL

LCR meters / high-voltage testers

Thermal modeling tools

Job description

Director / MTS, Heaters and Electrostatic Chuck (ESC)

Step into a career with ASM, where cutting edge technology meets collaborative culture.

For over 55 years ASM has been ahead of what’s next, at the forefront of innovation and what’s technologically possible. With more than 4,500 ASMers representing 70 nationalities, our people and our advanced semiconductor devices are playing a crucial role in trends such as 5G, cloud computing, AI, and autonomous driving.Butwe’re more than just a tech company. We value diversity, inclusion and sustainability as we strive to make a positive impact on the world. Our development programs help support your growth, shaping your future and pushing the boundaries of innovation to unleash potential.

As Director/MTS for Heaters and Electrostatic Chuck (ESC) you will be accountable for the design, and delivery of hardware engineering solutions focused on ESC and heaters technology. This role is responsible for focusing on the development of highly innovative technologies over legacy solutions.

Key Responsibilities

• Design and develop Johnsen-Rahbek (JR) and Coulombic-type ESC assemblies for 300mm wafer processing applications.
• Select and qualify dielectric materials (alumina, AlN , Y2O3) for ESC ceramic layers based on electrical, thermal, and chemical compatibility requirements.
• Define ESC clamping voltage, leakage current, and chucking / dechucking performance specifications.
• Characterize ESC electrical properties including volume resistivity, dielectric constant, and breakdown voltage across process temperature ranges.
• Analyze and mitigate wafer backside contamination, particle generation, and arcing risks associated with ESC operation.
• Support ESC integration with RF bias and DC chucking power supplies in plasma processing chambers.
• Design multi-zone embedded heater assemblies for uniform wafer temperature distribution across process temperatures (room temperature to 700°C+).
• Perform thermal modeling and simulation (FEA) to optimize heater layout, power density, and zone configuration.
• Develop and validate closed-loop temperature control systems including thermocouple/RTD sensor selection and PID control tuning.
• Characterize heater uniformity, ramp rates, and thermal response using wafer-level temperature mapping tools.
• Manage thermal stress and CTE mismatch between heater, ceramic, and base plate materials to ensure long-term reliability
• Required Qualifications
• Master's degree or PhD in Materials Science, Ceramic Engineering, or related discipline.
• 10+ years of experience in semiconductor capital equipment engineering, with direct exposure to ESC or heater technologies.
• Experience with 300mm wafer processing tools and OEM component qualification processes.
• Knowledge of high-purity ceramic fabrication techniques (sintering, plasma spray, anodization).
  
• Familiarity with reactive process chemistries (fluorine, chlorine plasmas) and their impact on ESC/heater materials
  .
• Solid understanding of electrostatic clamping mechanisms (Coulombic and JR force models) and their process dependencies.
• Experience with ceramic materials and thin-film dielectric systems used in semiconductor equipment.
• Familiarity with thermal management in vacuum environments, including radiation, conduction, and convection heat transfer.
• Hands-on experience with electrical characterization equipment (LCR meters, high-voltage testers, curve tracers).
• Knowledge of plasma processing systems (etch, CVD, PVD, or ALD) and their requirements for ESC performance.
• Experience with FEA thermal simulation tools (ANSYS, COMSOL, or equivalent).
• Strong analytical and problem-solving ability with a systematic approach to failure analysis.
• Effective communication skills and ability to work in cross-functional teams.

ASM is an equal opportunity employer and considers qualified applicants for employment without regard to race, color, religion, age, nationality, social or ethnic origin, sexual orientation, gender, gender identify or expression, marital status, pregnancy, political affiliation, disability, genetic information, veteran status, or any other characteristic protected by law.

We make the tech that enables the chips in devices which improve lives around the world. We do this with an eye to the future, pushing the boundaries of what’s possible through cutting-edge innovation, and driving the next wave of technological breakthroughs that shape how we live, work, and connect.