Process Engineer - Ion Implant

Axcelis Technologies, Inc.; Beverly (MA); On-site; USD 67,812 - 101,719; Full time

Benefits offered by this job

Team Incentive bonus plan

Comprehensive benefits package

Job summary

Axcelis Technologies, Inc. is seeking a Process Engineer to support the characterization and application of ion implant equipment. The role includes executing tool characterization, analyzing performance data, and engaging with customers. Candidates should possess a Bachelor’s degree in Electrical Engineering or a related field and up to 3 years of relevant experience.

The position offers a salary range between $67,812.80 and $101,719.20, alongside eligibility for a bonus plan and comprehensive benefits.

Qualifications

• 0–3 years of experience in semiconductor processing or related technical role.
• Familiarity with ion implant concepts is a plus.
• Ability to document technical results clearly.

Responsibilities

• Support the definition and maintenance of operational parameter space.
• Collect and maintain information related to installed customer tools.
• Assist Systems Engineers with customer tool demonstrations.

Skills

Electrical Engineering

Physics

Data analysis

Programming (JMP, Minitab, Matlab)

Education

Bachelor’s degree in a relevant field

Job description

Process Engineer – Ion Implant

The Process Engineer supports the characterization, documentation, and application of ion implant equipment to meet customer and product requirements. They act as the internal customer interfacing with engineering, marketing, and field teams to support the development and release of products and upgrades. This role focuses on executing tool characterization activities, analyzing tool performance data, supporting customer engagements and demonstrations, and collaborating with cross‑functional teams under established technical direction.

Responsibilities

1. Tool Characterization and Operational Support: Support the definition and maintenance of the operational parameter space of ion implant tools based on established technical requirements and customer use cases. Define and execute characterization plans to evaluate tool performance across defined operating conditions. Assist in identifying gaps in characterization data and documentation and contribute to plans to close those gaps. Generate and maintain data packages describing the current operational window of assigned tool sets based on released machine specifications. Organize and update characterization data, reports, and Best Method documentation for internal teams, marketing, and customer‑facing groups. Support evaluation of new hardware or procedural changes and assist with required characterization and documentation updates.
2. Customer Installed‑Base Support: Collect and maintain information related to installed customer tools, including process applications, technology nodes, and production status. Gather and analyze tool performance data such as repeatability, stability, particle performance, uptime, and SPC‑related metrics. Document performance trends and observations for internal review. Support customer interactions to identify tool performance concerns or process limitations requiring further analysis or characterization.
3. Equipment Demonstration Lab Support: Assist Systems Engineers and Equipment Engineers with customer tool demonstrations. Review customer technical requirements and support feasibility assessments under guidance. Provide hands‑on support for recipe setup, wafer processing, and system qualification prior to customer wafer runs. Help ensure tool operation aligns with defined demonstration requirements. Contribute to preparation and distribution of customer demonstration reports and assist with follow‑up actions.
4. Cross‑Functional Collaboration: Work with Marketing, Systems Engineering, and Engineering teams to communicate characterization results and tool performance findings. Support documentation and updates to operating specifications for new processes, applications, or tool configurations. Assist with collection and organization of competitive performance data to support product positioning efforts. Communicate findings, issues, and improvement opportunities clearly to internal stakeholders.
5. Application Support and Development Support: Identify new tool applications through customer feedback, marketing input, and technical literature review. Participate in joint development or evaluation activities with customers under defined project scope. Assist internal engineering teams with data collection and analysis required for hardware or software upgrades. Share application and characterization results with relevant internal teams.

Qualifications & Skills

• Bachelor’s degree in Electrical Engineering, Physics, Materials Science, Chemical Engineering, or related field.
• 0–3 years of experience in semiconductor processing, equipment engineering, or related technical role.
• Familiarity with ion implant concepts (dose, energy, species, uniformity) or other semiconductor process tools is a plus.
• Basic understanding of SPC, data analysis, and experimental methodology.
• Ability to program basic engineering functions in JMP, Minitab, Matlab is a plus.
• Ability to document technical results clearly and communicate effectively with cross‑functional teams.
• Willingness to learn hands‑on tool operation and support customer‑facing activities.

Equal Opportunity Statement

Axcelis policy: provide equal opportunity in all areas of employment for all persons free from discrimination based on race, sex, religion, age, color, national origin, disability status, medical condition (including pregnancy), veteran status, sexual orientation, marital status, or any other characteristic protected by federal, state or local law. Axcelis will provide reasonable accommodation necessary to enable a disabled candidate or employee to perform the essential functions of the position, unless the accommodation would create an undue hardship for the Company.

Salary

U.S. Base Salary Range: $67,812.80 - $101,719.20. This base salary range reflects the typical compensation for this role across U.S. locations. Salary is determined by role and level, including experience, education, location and internal equity. Base pay is one part of the total compensation package which includes eligibility for the Axcelis Team Incentive bonus plan and a comprehensive benefits package (for regular employees working 20+ hours a week).