Field Service Engineer Plasma Technology

Oxford Instruments plc; Chicago (IL); Remote; USD 75,000 - 90,000; Full time

Job summary

Oxford Instruments plc is seeking a remote-based Field Service Engineer for North America, including Chicago, IL. The role involves travel to customer sites to install, commission, and maintain plasma etch and deposition systems across multiple platforms.

The candidate will diagnose complex issues, train customers, and ensure high uptime with strict adherence to safety and cleanroom standards. A 3–5 year background in semiconductor equipment service is required.

Qualifications

• Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Physics, or related technical field.
• 3–5 years of field service experience in the semiconductor industry.
• Familiarity with cleanroom operations and safety protocols.
• Hands-on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps.
• Able to travel extensively Monday through Friday.

Responsibilities

• Lead installation and commissioning of plasma etch and deposition systems.
• Perform preventive and corrective maintenance with precise diagnostics.
• Engage with customers and provide hands-on training.
• Troubleshoot hardware and software issues using specialized tools.
• Calibrate components and support system upgrades as needed.

Skills

Field service experience

RF theory

ICP systems

Vacuum technologies

Ability to travel Mon-Fri

Education

Bachelor’s degree in Electrical/Mechanical Engineering

Tools

Vacuum leak detectors

RF power meters

DVMs

LCR meters

Multimeters

Brooks platforms

MKS components

Job description

Location

REMOTE – North America -based – Chicago, USA. Candidates must reside within reasonable travel time (typically 60 minutes) of a major airport to support frequent weekday travel to customer sites.

The Role

Represent Oxford Instruments by delivering world-class technical support, installation, and maintenance for plasma etch and deposition systems (e.g., PlasmaPro, FlexAL, Estrelas etcher). This role demands a hands‑on problem solver with strong technical acumen, clear communication skills, and a proactive mindset. You’ll collaborate across teams, escalated issues when needed, and maintain detailed documentation to support continuous improvement. With extensive travel across customer sites, you’ll play a critical role in driving customer satisfaction and advancing cutting‑edge semiconductor technologies.

Key Responsibilities

• System Installation & Commissioning Lead the installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD), ensuring full compliance with customer specifications, cleanroom standards, and process readiness.


• Preventive & Corrective Maintenance Execute scheduled and emergency maintenance with precision. Diagnose root causes beyond surface‑level symptoms and validate repairs against stringent vacuum tolerances, leak‑up rates, and process benchmarks.


• Customer Engagement & Technical Training Build trust and long‑term relationships through responsive communication and hands‑on training. Empower customers to operate and maintain systems confidently across key processes.


• Advanced Troubleshooting Resolve complex hardware, and software issues using specialized tools (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters). Provide remote support when needed to minimize downtime and maximize uptime.


• Calibration & System Upgrades Calibrate critical components (AMUs, RF Generators, APCs, MFCs) and implement performance‑enhancing upgrades (turbo pumps, PLCs, breakers) to ensure optimal system reliability and throughput.

Required Qualifications & Experience Education & Industry Background

• *Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field.


• *Equivalent hands‑on experience in semiconductor equipment service may substitute.


• *3–5 years of field service experience in the semiconductor industry, with a focus on plasma etch and deposition systems.


• *Familiarity with cleanroom operations and safety protocols.


• *Hands‑on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps.


• *Skilled in troubleshooting 208V electrical systems and 24V control subsystems


• *Experience with RF power components and pneumatically driven


• * Diagnostics & Technical Toolso Proficient with diagnostic instruments:


• * Vacuum leak detectors


• * RF power meters


• *Ability to read and interpret mechanical, pneumatic, and electrical schematics and plumbing diagrams.


• * Process Knowledgeo Strong understanding of RF theory and inductively coupled plasma (ICP) systems.


• *Familiarity with semiconductor processes: RIE, PECVD, ICP, ALD.Physical & Travel *Requirementso Hold a valid driver’s license and safe driving record, passport, and ability to travel independently.


• *Must be physically agile and comfortable working in confined or awkward spaces.


• *Capable of independently lifting and handling equipment weighing up to 50 lbs.


• *Able to commit to extensive weekday travel to support customer installations and service needs, Monday through Friday.

Preferred Skills & Attributes

• *Experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components.


• *Knowledge of calibration and optimization of APCs and MFCs.

Work Ethic & Collaboration

• *Strong manual dexterity and ability to maintain a clean, organized workspace in cleanroom attire.o Proactive problem-solving and openness to continuous learning.


• *Effective communicator with strong listening skills.


• *Adaptable to evolving technologies and customer needs.


• *Comfortable working independently or as part of a team.

What Sets You Apart: Commitment to Service Excellence

• *Passion for solving complex technical challenges with precision and care.


• *Proactive in anticipating customer needs and delivering timely, high‑quality solutions.


• *Builds trust through clear communication and confident issue resolution.


• *Eager to learn, grow, and collaborate to uphold the highest standards of service

Compensation

In accordance with Massachusetts law, the expected salary for this full-time, benefited position is between $75,000 - $90,000. The actual compensation will be determined considering factors such as relevant skills and experience and other factors permitted by law