Field Service Engineer - High Volume Manufacturing

Oxford Instruments GmbH; Concord (MA); On-site; USD 95,000 - 115,000; Full time

Job summary

Oxford Instruments seeks a Field Service Engineer - High Volume Manufacturing to support HVM customers in Concord, MA. You will lead installation, maintenance, and upgrades for advanced plasma etch and deposition systems.

Travel to customer sites is required. The role demands strong RF theory, ICP knowledge, and hands-on semiconductor equipment experience. A BS in Engineering plus 3–5 years’ field service is expected.

Qualifications

• Bachelor’s degree in Electrical Engineering or related field.
• 3–5 years field service in semiconductors; plasma etch and deposition focus.
• Familiar with cleanroom operations and safety protocols.
• Strong RF theory and ICP understanding.
• Experience with RIE, PECVD, ICP, ALD processes.
• Valid driver’s license and willingness to travel.

Responsibilities

• Lead installation and commissioning of advanced plasma etch and deposition systems.
• Perform preventive and corrective maintenance with strict tolerances.
• Engage customers and provide technical training and knowledge transfer.
• Resolve hardware/software issues; provide remote support to minimize downtime.
• Calibrate components and implement performance upgrades to ensure uptime.

Skills

Field service experience

RF theory

ICP systems

Reading schematics

Education

Bachelor’s degree in Electrical Engineering

Equivalent hands-on semiconductor service experience

Tools

Vacuum leak detectors

RF power meters

DVMs

LCR meters

Multimeters

Megohm meters

Brooks platforms

Pfeiffer/Edwards pumping systems

MKS components

Job description

Field Service Engineer - High Volume Manufacturing (HVM)

Date: Aug 10, 2026

Location

Concord, MA, US

Why Oxford Instruments?

Our purpose is to accelerate the breakthroughs that create a brighter future for our world. Our technology and scientific expertise enable our customers to discover and bring to market exciting new advances that drive human progress. We aim to be the scientific instrumentation partner in every significant lab and production facility across the world. Our people and culture are vital to our success. We strive to offer the opportunities that will attract, engage, motivate and develop the very best talent. This involves creating an inclusive environment and culture where difference is valued and people are recognised for what they deliver and bring to the team.

Our Ways Of Working Are Lived Every Day And Are As Follows

• We start with the customer
• We succeed by being focused
• We make and keep our promises
• We work together as one team
• We help and trust each other to succeed

Applicants must be authorized to work for ANY employer in the US. We are unable to sponsor or take over sponsorship of employment Visa currently.

Location

Texas (Dallas / Houston preferred)

Dedicated HVM customer support.

The Role

Represent Oxford Instruments as the senior onsite technical expert supporting High Volume Manufacturing (HVM) semiconductor customers. Deliver installation, preventive maintenance, corrective maintenance, troubleshooting, process support, customer training, and operational partnership to maximize uptime and production.

Key Responsibilities

• System Installation & Commissioning Lead the installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD), ensuring full compliance with customer specifications, cleanroom standards, and process readiness.
• Preventive & Corrective Maintenance Execute scheduled and emergency maintenance with precision. Diagnose root causes beyond surface-level symptoms and validate repairs against stringent vacuum tolerances, leak-up rates, and process benchmarks.
• Customer Engagement & Technical Training Build trust and long-term relationships through responsive communication and hands- on training. Empower customers to operate and maintain systems confidently across key processes.
• Advanced Troubleshooting Resolve complex hardware, and software issues using specialized tools (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters). Provide remote support when needed to minimize downtime and maximize uptime.
• Calibration & System Upgrades Calibrate critical components (AMUs, RF Generators, APCs, MFCs) and implement performance-enhancing upgrades (turbo pumps, PLCs, breakers) to ensure optimal system reliability and throughput.

Required Qualifications & Experience

• Education & Industry Background
  • Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field.
  • Equivalent hands-on experience in semiconductor equipment service may substitute.
  • 3–5 years of field service experience in the semiconductor industry, with a focus on plasma etch and deposition systems.
  • Familiarity with cleanroom operations and safety protocols.
  • Vacuum & Power Systems
    • Hands-on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps.
    • Skilled in troubleshooting 208V electrical systems and 24V control subsystems.
    • Experience with RF power components and pneumatically driven
• Diagnostics & Technical Tools
  • Vacuum leak detectors
  • RF power meters
  • DVMs, LCR meters, multimeters, megohm meters
  • Proficient with diagnostic instruments:
  • Ability to read and interpret mechanical, pneumatic, and electrical schematics and plumbing diagrams.
• Process Knowledge
  • Strong understanding of RF theory and inductively coupled plasma (ICP) systems.
  • Familiarity with semiconductor processes: RIE, PECVD, ICP, ALD.
• Physical & Travel Requirements
  • Hold a valid driver’s license and safe driving record, passport, and ability to travel independently.
  • Must be physically agile and comfortable working in confined or awkward spaces.
  • Capable of independently lifting and handling equipment weighing up to 50 lbs.
  • Able to commit to extensive weekday travel to support customer installations and service needs, Monday through Friday

Preferred Skills & Attributes

• Platform & Component Experience
  • Experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components.
  • Knowledge of calibration and optimization of APCs and MFCs.
• Work Ethic & Collaboration
  • Strong manual dexterity and ability to maintain a clean, organized workspace in cleanroom attire.
  • Proactive problem-solving and openness to continuous learning.
  • Effective communicator with strong listening skills.
  • Adaptable to evolving technologies and customer needs.
  • Comfortable working independently or as part of a team.

What Sets You Apart: Commitment to Service Excellence

• Passion for solving complex technical challenges with precision and care.
• Proactive in anticipating customer needs and delivering timely, high-quality solutions.
• Builds trust through clear communication and confident issue resolution.
• Eager to learn, grow, and collaborate to uphold the highest standards of service.

Additional HVM Responsibilities

• Serve as the dedicated senior engineer supporting customer production operations (8:00 AM-5:00 PM).
• Drive uptime, availability, MTTR, and first-time fix performance.
• Support tool installations, qualifications, and production ramp activities.
• Partner with Process Engineers, Customer Success, Engineering, and Operations.
• Lead root cause investigations and reliability improvements.
• Mentor junior Field Service Engineers.
• Participate in daily operational reviews and weekly customer performance meetings.

Preferred Experience

• 3+ years supporting semiconductor capital equipment in HVM environments.
• Strong customer-facing leadership and communication skills.
• Ability to work independently in a fast-paced production environment.

Compensation

The expected salary for this full-time, benefited position is between $95,000 - $115,000. The actual compensation will de determined considering factors such as relevant skills and experience and other factors permitted by law.

Nearest Major Market: Boston