Lithography Process Engineer - Drive CD/Overlay Excellence

GlobalFoundries; Singapore; On-site; SGD 70,000 - 100,000; Full time

Job summary

GlobalFoundries (GF) is seeking a Lithography Process Engineer in Singapore to sustain, optimize, and develop photolithography processes in a high-volume manufacturing environment. You will work with advanced lithography tools and metrology systems to ensure CD control, overlay accuracy, and defect reduction.

The role requires 1–3 years in semiconductor wafer process engineering, strong problem-solving, and collaboration with equipment engineers.

Qualifications

• Bachelor Degree in Electrical / Electronics / Mechanical / Mechatronics / Microelectronics Engineering
• 1 to 3 years of relevant experience in semiconductor wafer process engineering
• Proven ability to identify, assess and solve problems
• Perform Normal / Swing Shift (or 12-hour rotating shift if required)

Responsibilities

• Monitor and analyze SPC/ESPC charts for lithography modules using SPACE; respond to OOC/OOS events.
• Perform CD and overlay analysis using CD-SEM, scatterometry, and overlay metrology tools (e.g., KLA, ASML YieldStar).
• Optimize photoresist coating, soft bake, exposure, PEB, and development processes.
• Manage and tune stepper/scanner exposure tools (e.g., ASML, Nikon) for optimal performance and tool matching.
• Conduct DOE and split lot analysis using JMP, Klarity ACE, and other statistical tools.
• Troubleshoot lithography defects such as bridging, footing, scumming, and resist residues.
• Collaborate with Equipment Engineers on tool qualification, FEM, and process window optimization.
• Maintain and optimize reticle management, focus and exposure control, and alignment strategies.
• Drive process improvements to enhance CD uniformity, overlay performance, LER, and CDU.
• Support technology transfers, NPI, and process ramp-up activities.
• Lead cross-functional teams to resolve yield excursions and implement CAPA.
• Ensure compliance with TS16949 and other quality standards through audits and docs.

Skills

Problem solving

Analytical thinking

Team collaboration

Education

Bachelor Degree in Electrical / Electronics / Mechanical / Mechatronics / Microelectronics Engineering

Tools

SPACE

CD-SEM

KLA

ASML YieldStar

JMP

Klarity ACE

Job description

GlobalFoundries (GF) is seeking a Lithography Process Engineer in Singapore to sustain, optimize, and develop photolithography processes in a high-volume manufacturing environment. You will work with advanced lithography tools and metrology systems to ensure CD control, overlay accuracy, and defect reduction.

The role requires 1–3 years in semiconductor wafer process engineering, strong problem-solving, and collaboration with equipment engineers.