Sr. Field Service Engineer

Plasma-Therm LLC; Arizona; On-site; USD 130,000 - 160,000; Full time

Job summary

Plasma-Therm LLC seeks a Senior Field Service Engineer IV to lead on-site installation, startup, and advanced troubleshooting for wet and plasma processing equipment in Arizona. You will manage OEM training, develop SOPs, and coordinate with customer fab teams to meet aggressive timelines.

The role demands deep technical expertise in chemical delivery, vacuum systems, robotics, and cleanroom safety, with strong customer-facing leadership and communication skills.

Qualifications

• 8+ years of direct field service or equipment engineering in semiconductor capital equipment.
• Associate or Bachelor’s degree in Electrical/Mechanical Engineering, Mechatronics, or Semiconductor Technology.
• Experience with wet processing/wet etch, dry/vacuum systems, and P&ID reading.
• Strong communication and leadership for escalations and field coordination.

Responsibilities

• Overseas OEM training and product bring-up at partner facilities.
• Lead on-site tool uncrating, installation, and commissioning checks.
• Advanced troubleshooting across wet etch and Plasma-Therm platforms.
• Author 8D reports and drive root-cause analyses with global teams.
• Interface with customer fab management and ensure safety compliance.

Skills

Chemical dispense delivery

Wet processing mechanics

Fluidics

High-purity piping

Process temperature control

Vacuum systems

Robotics

Customer-facing leadership

Communication skills

Problem-solving

Independent work

Education

Associate’s or Bachelor’s degree in Electrical/Mechanical Engineering, Mechatronics, or Semiconductor Technology

Tools

Jira

Confluence

ERP platforms

Job description

Plasma-Therm is a leading provider of advanced processing equipment and solutions, specializing in semiconductor manufacturing.

Shift / Travel: Local Fab Support (Phoenix, AZ Area) with On-Call Rotation & Limited Overseas/Domestic Travel

Position Overview

The Senior Field Service Engineer IV (FSE IV) serves as a lead technical expert responsible for tool installation, startup, advanced troubleshooting, preventive maintenance, and modifications for advanced semiconductor capital equipment. In this high-visibility role supporting our Strategic OEM Partnership, the FSE IV will provide critical on-site support at a leading-edge semiconductor manufacturing facility in Arizona across both strategic partner wet processing product lines (Wet Etch / Clean platforms) and Plasma-Therm plasma processing equipment (e.g., PECVD and Dry Etch systems).

The ideal candidate brings deep technical expertise in chemical dispense delivery, wet processing mechanics, fluidics, high-purity piping, process temperature control, vacuum systems, and robotics, along with strong customer-facing leadership skills to manage complex fab escalations.

Key Responsibilities

1. Overseas OEM Training & Product Bring-Up

• Complete intensive, hands-on factory training at the strategic partner’s manufacturing facility in Taiwan on new pre-release wet processing/wet etch platforms.
• Work directly with factory development engineers during sub-assembly, software configuration, and initial tool integration.
• Help capture, review, and refine initial standard operating procedures (SOPs), maintenance protocols, and commissioning checklists for field deployment.
• Lead and oversee on-site tool uncrating, rigging supervision, facility chemical/utility hookup verification, and system power-on for new tool deliveries in Phoenix.
• Execute pre-commissioning checks, sensor calibrations, fluid delivery testing, and Site Acceptance Testing (SAT) to achieve fast time-to-first-wafer.
• Interface directly with customer fab engineers, facility chemical engineering teams, and rigging contractors to maintain installation schedules.

3. Advanced Technical Troubleshooting & Dual-Platform Support

• Perform routine preventive maintenance (PM) and unscheduled corrective maintenance across both wet etch systems and Plasma-Therm dry processing platforms under strict SLA guidelines (<2 hour response target).
• Lead root-cause failure analysis for complex chemical delivery, fluidic valves, heater control, robotic wafer transfer, vacuum, and electromechanical escalations.
• Author and drive 8D Quality/Failure Reports to closure in collaboration with factory engineering teams in Taiwan and domestic headquarters.
• Serve as the primary technical point of contact during critical tool-down scenarios, conducting daily technical updates with customer fab management.
• Ensure strict adherence to customer safety (EHS), cleanroom, chemical handling, and Lockout/Tagout (LOTO) protocols.
• Mentor and train peer engineers, supporting the development of internal SOPs and training logs.

Required Qualifications & Experience

• Education: Associate’s or Bachelor’s degree in Electrical/Mechanical Engineering, Mechatronics, Semiconductor Technology, or equivalent military technical training/experience.
• Experience: 8+ years of direct field service or equipment engineering experience in semiconductor capital equipment manufacturing or advanced wafer fabs.

Technical Skills:

• Wet Processing / Wet Etch Expertise: Deep knowledge of liquid chemical delivery systems, high-purity chemical plumbing/valves (PFA/PVDF), dosing pumps, chemical inline heating/chilling, bath recirculation, flow meters, and liquid filtration.
• Dry / Vacuum Systems: Proficiency with vacuum systems (turbomolecular & dry pumps, vacuum gauging) and electromechanical assemblies.
• Hands-on experience reading complex electrical schematics, Piping & Instrumentation Diagrams (P&ID), fluidic schematics, and software diagnostic logs.
• Strong working knowledge of cleanroom safety protocols, hazardous chemical handling (acids, bases, solvents), chemical spill protocols, and LOTO procedures.

Soft Skills:

• Exceptional written and verbal communication skills for customer escalation management.
• Strong problem-solving mindset using structured problem-solving methodologies (e.g., 8D, 5 Whys).
• Ability to work independently in a fast-paced fab environment and handle high-pressure customer situations.

Preferred Qualifications

• Prior experience with Plasma-Therm equipment (e.g., Kobus PECVD, plasma etch, PVD, Evaporator systems).
• Prior experience working within high-volume 300mm wafer fabrication facilities.
• Familiarity with enterprise tracking tools (e.g., Jira, Confluence, ERP platforms) for tracking service cases, tool serial numbers, and field actions.

Work Environment & Physical Requirements

• Must be able to work inside a Class 10/100 semiconductor cleanroom environment requiring full bunny suit protocol.
• Must be able to lift up to 50 lbs, bend, stoop, and stand for extended periods.
• Flexibility to work varied shifts, including weekend coverage or emergency on-call rotations as customer demand dictates.