Field Service Engineer (Plasma Technology) Midwest Region

Oxford Instruments; Chicago (IL); Remote; USD 95,000 - 115,000; Full time

Benefits offered by this job

Travel opportunities

Competitive benefits

Job summary

Oxford Instruments Plasma Technology is seeking a Field Service Engineer to install, commission, and service plasma etch and deposition systems across North America. The role is remote from the Chicago/Midwest region, with extensive travel to customer sites and frequent collaboration with customers, engineering teams, and technical specialists.

You will diagnose issues, perform calibrations, train operators, and ensure system performance and uptime in demanding cleanroom environments.

Qualifications

• 3–5 years of field service experience in semiconductor industry.
• Strong experience supporting plasma etch and/or deposition equipment.
• Familiarity with cleanroom environments and semiconductor manufacturing processes.
• Hands-on experience with vacuum systems including turbo, cryo, and roughing pumps.
• Experience troubleshooting 208V electrical systems and 24V control circuits.

Responsibilities

• Install and commission advanced plasma etch and deposition systems (RIE, ICP, CVD, ALD, ALE, ICP‑CVD).
• Perform preventive and corrective maintenance on semiconductor equipment.
• Diagnose root causes of technical issues and implement long‑term solutions.
• Provide operator training and technical guidance to maximize uptime and performance.
• Maintain accurate service documentation and share knowledge across teams.

Skills

Field service

Technical troubleshooting

Customer service

Travel readiness

Education

Bachelor's degree in Electrical/Mechanical Engineering or Physics

Tools

RIE

ICP

CVD

ALD

ALE

APCs

MFCs

Job description

Are you passionate about solving complex technical challenges and working with some of the most advanced semiconductor technologies in the world? Join Oxford Instruments Plasma Technology as a Field Service Engineer and play a pivotal role in supporting customers who are developing next-generation devices and breakthrough innovations.

As a Field Service Engineer, you'll be the face of Oxford Instruments, delivering exceptional technical expertise, world-class customer service, and hands‑on support for our industry-leading plasma etch and deposition systems. This is a unique opportunity to combine cutting‑edge technology, customer interaction, and extensive travel while helping customers maximize the performance of their equipment.

This is a remote role in the Chicago or Midwest USA, open to candidates across the U.S. who are willing to relocate to the Midwest. Must be located within approximately 60 minutes of a major airport to support frequent travel to customer sites across North America.

Why Join Oxford Instruments?

At Oxford Instruments, we enable the world's leading researchers and manufacturers to push the boundaries of science and technology. You'll work with innovative products, collaborate with highly skilled colleagues, and make a direct impact on customer success within the rapidly evolving semiconductor industry.

The Opportunity

In this highly visible customer-facing role, you will install, maintain, troubleshoot, and optimize advanced plasma etch and deposition systems. You'll work closely with customers, engineering teams, and technical specialists to ensure exceptional system performance and customer satisfaction.

If you thrive in a hands‑on environment, enjoy solving challenging technical problems, and are energized by travel and customer interaction, we'd love to hear from you.

What You’ll Be Doing

Install and Commission Advanced Systems

• Lead the installation and commissioning of plasma etch and deposition systems, including RIE, ICP, CVD, ALD, ALE, and ICP‑CVD technologies.
• Ensure systems meet customer specifications, process requirements, and cleanroom standards.
• Verify system readiness and support successful customer acceptance.

Deliver Exceptional Service & Maintenance

• Perform preventive and corrective maintenance on sophisticated semiconductor equipment.
• Diagnose root causes of technical issues and implement effective long‑term solutions.
• Validate repairs against vacuum, process, and performance specifications.

Build Strong Customer Relationships

• Serve as a trusted technical advisor to customers.
• Provide operator training and technical guidance to maximize system uptime and performance.
• Deliver responsive support and maintain a high level of customer satisfaction.

Troubleshoot Complex Technical Challenges

• Investigate and resolve hardware, electrical, vacuum, RF, pneumatic, and software‑related issues.
• Utilize advanced diagnostic equipment including vacuum leak detectors, RF power meters, DVMs, LCR meters, and multimeters.
• Provide remote support when necessary to minimize customer downtime.
• Perform system calibrations, upgrades, and performance enhancements.
• Support installation of new components, including pumps, RF generators, APCs, MFCs, PLCs, and control systems.
• Maintain accurate service documentation and share knowledge across teams.

What We’re Looking For

Education

• Bachelor's degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical discipline.
• Equivalent semiconductor equipment service experience will also be considered.

Experience

• 3-5 years of field service experience within the semiconductor industry.
• Strong experience supporting plasma etch and/or deposition equipment.
• Familiarity with cleanroom environments and semiconductor manufacturing processes.
• Hands‑on experience with vacuum systems including turbo, cryo, and roughing pumps.
• Experience troubleshooting 208V electrical systems and 24V control circuits.

Technical Expertise

• Strong understanding of RF power systems and inductively coupled plasma (ICP) technology.
• Working knowledge of semiconductor processes including RIE, PECVD, ICP, and ALD.
• Ability to interpret electrical, mechanical, pneumatic, and process schematics.
• Experience using diagnostic and calibration tools in a semiconductor environment.

Preferred Experience

Familiarity with other similar platforms, vacuum systems, and components.

• Experience calibrating and optimizing APCs and MFCs.
• Knowledge of advanced vacuum and process control technologies.

We’re looking for someone who:

• Enjoys solving challenging technical problems and finding lasting solutions.
• Communicates clearly and builds strong customer relationships.
• Thrives in both independent and team‑based environments.
• Is adaptable, proactive, and committed to continuous learning.
• Maintains high standards of organization, safety, and professionalism.

Travel & Physical Requirements

• Valid driver's license, passport, and ability to travel independently.
• Ability to travel extensively (90%) Monday through Friday across North America.
• Comfortable working in cleanroom environments and confined spaces.
• Able to safely lift and handle equipment weighing up to 50 lbs.
• Strong manual dexterity and attention to detail.

The expected salary for this full‑time, benefited position is between $95,000 - $115,000.

The expected salary for this full‑time, benefited position is between $95,000 - $115,000.

Oxford Instruments offers a competitive compensation package and comprehensive benefits. Actual compensation will be determined based on qualifications, experience, skills, and other factors permitted by law.

Be Part of What’s Next

At Oxford Instruments, you’ll do more than service equipment. You’ll help enable the technologies that shape the future. If you excited by advanced semiconductor technology, customer engagement, and solving complex engineering challenges, we invite you to apply and join our growing team.

#LI-CW1 #LI-Hybrid

All qualified applicants will receive consideration for employment without regard to race, colour, religion, sex, sexual orientation, gender identity, national origin, or disability.

We encourage applications from people of all backgrounds and would ask you to get in touch if you are concerned about any barriers you feel you may be facing in your application process with us.

Note to recruitment agencies: Oxford Instruments operates a Preferred Supplier List, and we do not accept unsolicited agency CVs. Please do not forward candidate details in response to this advert, or to any Oxford Instruments employees or other company locations. Oxford Instruments is not responsible for any fees related to unsolicited CVs.