Senior Process Engineer - Plasma

ASM; Phoenix (AZ); On-site; USD 120,000 - 190,000; Full time

Job summary

ASM is seeking R&D-oriented engineers to advance plasma-based semiconductor manufacturing equipment. You will conduct research, characterize hardware, design experiments, and analyze process-hardware interactions to improve existing systems and develop new functionalities.

Ideal candidates hold a PhD in Physics or Engineering (or a Master with 3+ years) and have hands-on expertise with low-pressure RF plasma, PECVD/PEALD, and plasma diagnostics, collaborating across process development,

Qualifications

• PhD in Physics or Engineering or a Master with at least 3 years of professional experience.
• Deep knowledge of low-pressure RF plasma systems (ICP/CCP) and plasma chemistry.
• Experience with plasma diagnostics and etch/deposition processes.

Responsibilities

• Develop and improve semiconductor manufacturing equipment for plasma-based chambers.
• Conduct research, feasibility studies, testing, and data-driven evaluation.
• Characterize hardware, define process windows, and analyze interactions.
• Design experiments and report results; contribute to multi-disciplinary teams.
• Advance new equipment capabilities from concept to detailed design.

Skills

Low-pressure RF plasma

Plasma-surface interactions

Process development

Technical documentation

Cross-functional collaboration

Education

PhD in Physics or Engineering or Master with 3+ years

Tools

COMSOL

HFSS

CST Studio

Langmuir probes

OES

VI probes

Job description

Step into a career with ASM, where cutting edge technology meets collaborative culture.

For over 55 years ASM has been ahead of what's next, at the forefront of innovation and what's technologically possible. With more than 4,500 ASMers representing 70 nationalities, our people and our advanced semiconductor devices are playing a crucial role in trends such as 5G, cloud computing, AI, and autonomous driving. But we're more than just a tech company. We value diversity, inclusion and sustainability as we strive to make a positive impact on the world. Our development programs help support your growth, shaping your future and pushing the boundaries of innovation to unleash potential.

We are seeking R&D-oriented Engineers to join our team in the development and improvement of semiconductor manufacturing equipment, specifically focusing on plasma-based chambers.

Key Responsibilities:

• Conduct research and development of components and mechanisms, including concept creation, feasibility studies, and practical evaluation/testing.
• Perform hardware characterization, define process window, and analyze process-hardware interaction.
• Design experiments, collect data, analyze results, and compile reports on various process development experiments
• Develop new equipment and functionalities, as well as improve existing equipment, from specification to detailed design.
• Ability to function in multi-disciplined fields (Process development, Hardware development and Metrology)

Required Skills:

• PhD in Physics, Engineering (Chemical, Electrical, Mechanical, or related fields), Material Science or Master degree with at least 3 years professional experience.
• In-depth knowledge of low-pressure RF plasma systems, including ICP, CCP, and microwave plasma sources
• Strong understanding of plasma-surface interactions, and precursor/plasma chemistry. Familiarity with PECVD, PEALD, RIE process mechanisms.
• Excellent communication skills for technical documentation, cross-functional collaboration, and customer-facing discussions

Preferred Skills:

• Familiarity with epitaxial silicon growth and characterization
• Familiarity with EM and multi-physics simulation tools (e.g., COMSOL, High Frequency Simulation software such as Ansys HFSS, CST studio )
• Familiarity with plasma diagnostics (e.g., Langmuir probes, OES, VI probes)
• Familiarity with common thin-film & chemical characterization & metrology techniques including: SEM, TEM, XRD, Ellipsometry, XPS / AES as well as ICP-MS, particle analysis, sheet resistance probe analysis etc

We make the tech that enables the chips in devices which improve lives around the world. We do this with an eye to the future, pushing the boundaries of what's possible through cutting-edge innovation, and driving the next wave of technological breakthroughs that shape how we live, work, and connect.

To learn more about ASM, find us at asm.com and on LinkedIn , Facebook , Instagram, X and YouTube .

ASM is an equal opportunity employer and considers qualified applicants for employment without regard to race, color, religion, age, nationality, social or ethnic origin, sexual orientation, gender, gender identify or expression, marital status, pregnancy, political affiliation, disability, genetic information, veteran status, or any other characteristic protected by law.