Senior DUV Systems Diagnostics Engineer

ASML Germany GmbH

Chandler (AZ)

On-site

USD 110,000 - 160,000

Full time

14 days+

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Job summary

ASML, based in Chandler, Arizona, seeks a Senior Technical Support Engineer to diagnose and resolve complex DUV system issues, focusing on illumination, projection, and dose control modules. You will work with a global team to transfer knowledge, develop action plans, and improve diagnostic capabilities across regions.

The role emphasizes structured problem solving, MATLAB-based analysis, and 24/7 escalation support.

Qualifications

Master’s degree in engineering or a related technical field with 3-5 years of relevant working experience, or a Bachelor's Degree with 6-8 years of relevant working experience
Ability to interpret schematics, technical drawings, and design documentation
Advanced experience with feedback control systems
Knowledge of optical principles and the ability to troubleshoot projection lens performance, illumination profiles, dose control, and illumination sources such as mercury arc lamps and excimer lasers

Responsibilities

Diagnose and resolve complex technical issues escalated from field teams and customer sites, using structured troubleshooting and data analysis, with a focus on illumination, projection, and dose control modules of ASML DUV scanners
Create clear diagnostic action plans that help field engineers move efficiently from problem definition to technical resolution
Build deep technical expertise and continuously expand your knowledge of ASML DUV systems, diagnostics, and escalation processes
Troubleshoot Illumination, Projection, and Dose Control competency issues, including projection lens performance, illumination profiles, dose stability, and light-source performance
Use MATLAB and offline diagnostic tooling to analyze optical path behavior, identify root causes, and recommend effective corrective actions
Support 24/7 global escalation coverage through effective shift handoff, stakeholder updates, and collaboration with GSC teams in other regions
Share diagnostic knowledge with worldwide GSC competency teams and Customer Support engineers through documentation, training, and knowledge transfer
Identify lessons learned from escalations and contribute to continuous improvement actions that improve our future diagnostic capability and field self-sufficiency
Advance proactive diagnostics and predictive data modeling approaches that help reduce unexpected downtime
Demonstrate ASML’s Challenge, Collaborate, and Care behaviors while working with a global network of engineers and stakeholders