EUV Lithography Process Development Engineer- TPG

Micron Technology; Boise (ID); On-site; USD 80,000 - 120,000; Full time

Benefits offered by this job

Medical, dental, and vision plans

Paid family leave

Robust paid time-off program

Paid holidays

Job summary

Micron Technology is seeking a Lithography Pathfinding Process Development Engineer in Boise, Idaho. In this role, you will evaluate advanced lithography techniques, including EUV, to support the development of next-generation memory technology. You will collaborate with teams across technology development and manufacturing, ensuring readiness for new patterning technologies. The position requires a deep understanding of EUV lithography, photolithography processes, and relevant education in Engineering or Physics. A mix of hands-on and analytical skills is necessary for enhancing our lithography modules, and Micron offers comprehensive benefits for family healthcare needs and paid time off.

Qualifications

• Understanding of EUV lithography and its differences from DUV lithography.
• Knowledge of multiple patterning processes including LELE and SAQP.
• 3+ years of semiconductor industry experience related to Photolithography.

Responsibilities

• Lead and participate in pathfinding activities for new patterning technology.
• Develop EUV modules including setting up lithography processes.
• Work closely with defect inspection teams and mask shops.

Skills

Understanding of EUV lithography

Knowledge of 193nm immersion processes

Statistical analysis skills

Strong written and verbal communication skills

Education

M.S. or Ph.D. in Engineering, Chemistry, Physics

B.S. in Engineering, Chemistry, Physics with 10+ years experience

Tools

Prolith

S-Litho

JMP

Python

Job description

As a Lithography pathfinding process development engineer at Micron Technology in Boise, Idaho, you will evaluate advanced lithography including Extreme Ultra Violet (EUV) and High Numerical Aperture (High NA) EUV on next-generation memory parts. You will collaborate with our team to understand roadmap requirements for next-generation memory, and how new technologies intercept our roadmap. You will partner with technology development and manufacturing to ensure they will be ready to implement EUV and other new patterning approaches. This role may require travel to support high NA EUV work. Photolithography experts with High NA EUV pathfinding experience are encouraged to apply.

Summary

• Lead and participate in pathfinding activities for new patterning technology. This will include all lithography nodes, including 193nm immersion, EUV, and high NA EUV.
• Develop EUV modules in our technology development (TD) site. This includes setting up lithography processes and working with other process areas and process integration to meet manufacturing requirements.
• Travel up to once a month to New York or other locations to support early learning for high NA EUV.
• Work closely with defect inspection teams and our mask shop to develop appropriate inspection strategies for EUV masks.
• Collaborate with manufacturing sites to align on equipment and materials requirements, and to make sure EUV processes are aligned for transfer.

Minimum Requirements

• Understanding of EUV lithography, to include understanding differences between EUV lithography and deep ultraviolet (DUV) lithography.
• Knowledge and an understanding of 193nm immersion multiple patterning processes, including litho-etch-litho-etch (LELE) and self-aligned quadruple patterning (SAQP).
• Knowledge of optics for photolithography or experience with photolithography simulation software such as Prolith or S-Litho is helpful.
• Required Education: Degree/Major: M.S. or Ph.D. in Engineering, Chemistry, Physics, or study relevant to Photolithography plus at least 3 years of semiconductor industry experience; or a B.S. in Engineering, Chemistry, or Physics with 10+ years of semiconductor industry process related experience with emphasis on Photolithography.

Preferred Requirements

• Hands on industry experience with High NA EUV in a pathfinding setting.
• Coursework or proven experience showing strong statistical analysis skills, including design of experiments and data analysis. Experience with JMP, Python, or other statistical analysis software is helpful.
• Strong written and verbal communication skills. Ability to write and present clear and concise executive summaries for Micron and supplier management teams.

Benefits

Micron offers a choice of medical, dental, and vision plans in all locations enabling team members to select the plans that best meet their family healthcare needs and budget. Micron also provides benefit programs that help protect your income if you are unable to work due to illness or injury, and paid family leave. Additionally, Micron benefits include a robust paid time-off program and paid holidays. For additional information regarding the Benefit programs available, please see the Benefits Guide posted on micron.com/careers/benefits.

Equal Opportunity Employer

Micron is proud to be an equal opportunity workplace and is an affirmative action employer. All qualified applicants will receive consideration for employment without regard to race, color, religion, sex, sexual orientation, age, national origin, citizenship status, disability, protected veteran status, gender identity or any other factor protected by applicable federal, state, or local laws.