Senior Scientist, Lithography Process R&D, APM, IME

A*STAR - Agency for Science, Technology and Research; Singapore; On-site; SGD 90,000 - 130,000; Full time

Job summary

A*STAR - Agency for Science, Technology and Research in Singapore invites applications for a senior process development scientist in microelectronics. You will work with cross-functional stakeholders to plan and develop new lithography-based processes and verify their viability for research and industry collaborations.

You will lead characterization studies, optimize margins, and act as SME for researchers and vendors, publishing breakthroughs and helping to procure advanced equipment.

Qualifications

• Ph.D./MSc/BSc in relevant fields welcomed.
• 5+ years R&D/industry experience in nano to micron tech nodes.
• Experience handling 6”, 8” and/or 12” substrates; SiC/GaN/Photonic exposure preferred.
• Proficient with Photolithography tools including Immersion/KrF/I-line scanners/stepper/mask aligner.
• Hands-on metrology: CDSEM, Overlay, OCD, DRSEM, microscopy; able to create recipes for research requirements.
• Knowledge of design/simulation (Prolith, OPC) and reticle layout (OAS, GDS) review.
• Lithography theory, photoresist knowledge, process setup (swing curve, FEM, DOE) and margin optimization.
• Hardware and application knowledge in Lithography tools and metrology.
• Strong interpersonal and written/oral communication for internal/external stakeholders.

Responsibilities

• Plan and develop new processes with cross-functional stakeholders.
• Validate design, reticle tap-out and post tap-out verification.
• Assist in internal/external technical discussions to overcome process challenges.
• Perform process characterization and margin studies to determine process capability.
• Act as SME for researchers and industry partners to enable process/product realization.
• Publish process developments and breakthroughs in the research community.
• Engage equipment makers/vendors for selecting and procuring research equipment.
• Collaborate with fab team to establish SPC for newly developed processes.

Skills

Photolithography

EBEAM Lithography

Metrology

CDSEM

OCD

Reticle layout

Design & simulation

DOE / margin optimization

Communication

Education

PhD/MSc/BSc in relevant field

Tools

Immersion lithography

KrF lithography

I-line scanner

Mask Aligner

EBEAM Lithography

Prolith

OPC

Job description

Job Description

• Actively working with cross functional stake owners to plan and develop new process.
• Validate design, reticle tap out and post tap out verification.
• Assist in internal and external technical discussion to overcome process related challenge and provide relevant solution.
• Perform process characterization, margin study to determine the process capability of new process platform.
• Act as a subject matter expert and resource for researchers and industry partners to enable process and/or product realization.
• Publish process development outcome and breakthrough in research community.
• Engage with relevant equipment makers/vendors and responsible for selecting and procuring research equipment.
• Work with fab team in establishing SPC for newly developed process.

Requirements

• Ph.D./Master/bachelor’s degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, Chemistry, and Microelectronics, or closely related fields are welcome to apply.
• More than 5 years relevant working experiences in R&D and/or industry environment with broad exposure in handling 6”, 8” and/or 12” substrate covering nano to micron tech nodes, preferably experiences in SiC/GaN/Photonics.
• Proficient in Photolithography tools including Immersion/KrF/I-line Scanner/Stepper/Mask Aligner, knowledge in EBEAM Lithography tool will be added advantage.
• Hand on experiences in metrology including but not limited to CDSEM, Overlay, OCD, DRSEM, Microscope. Capable to create recipe to support various research requirement.
• Knowledge in design and simulation (Prolith, OPC, etc), reticle layout (oas, gds) review and basic tap out process.
• Equip with Lithography skills set including fundamental Lithography theory, Photoresist characteristic and application, new process setup (swing curve, FEM, DOE, statistical root cause analysis and problem-solving methods, etc), optimization and margin improvement.
• Relevant hardware and application knowledge in Lithography tools and metrology.
• Possess good interpersonal and oral/written communication skills, with ability to deliver clear and concise messages to both internal and external stakeholders.