Research Fellow (EUV Nanophotonics & Nanopatterning)

Nanyang Technological University; Singapore; Vor Ort; SGD 90.000 - 120.000; Vollzeit

Zusammenfassung

NTU Singapore’s LUMINOUS! Centre seeks a Research Fellow in EUV Nanophotonics to advance quantum control and meta-optical design for EUV light sources. You will fabricate chip-scale EUV emitters, develop masks at ~10 nm, and integrate devices with advanced vacuum and optical systems.

You’ll lead proof-of-concept demonstrations, publish in top journals, and mentor junior researchers in a multidisciplinary, international team.

Qualifikationen

• PhD with postdoctoral experience in a relevant field.
• Significant hands-on nanofabrication experience including e-beam lithography.
• Expertise in high-vacuum and UHV systems for chip-scale devices.
• Experience with EUV or soft X-ray regimes is preferred.
• Proven track record of publishing in peer-reviewed journals.

Aufgaben

• Lead design and assembly of high-vacuum/ultra-high vacuum systems.
• Develop, fabricate, and integrate chip-scale EUV emitters.
• Design and fabricate EUV nanopatterning masks with ~10 nm features.
• Characterize beam properties and device performance.
• Oversee EUV metrology and spectral analysis.
• Mentor PhD and MSc students and manage lab safety.

Kenntnisse

Electron beam systems

High-vacuum systems

Nanofabrication

EUV lithography

Thin-film deposition

FIB / SEM

Nanophotonics

COMSOL

Ansys

MEEP

Ausbildung

PhD (Physics/Engineering/Nanotechnology)

Tools

SEM/TEM

E-beam lithography

CVD

Sputtering

Vacuum bonding/sealing

FIB

Jobbeschreibung

School of Electrical and Electronic Engineering is one of the founding Schools of the Nanyang Technological University. Built on a culture of excellence, the School is renowned for its high academic standards and research. With over 3,000 undergraduates students and 2,000 graduate students it is one of the largest EEE schools in the world and ranks 4th in the field of Electrical & Electronic Engineering in the 2025 QS World University Rankings by Subjects. Today, the School has become one of the world’s largest engineering schools that nurtures competent engineers and researchers. Each year, the School graduates over a thousand students who are ready to take on great ambitions and challenges.

For more details, please view: https://www.ntu.edu.sg/eee

The LUMINOUS! Centre of Excellence for Semiconductor Lighting and Displays at NTU is seeking a Research Fellow in EUV Nanophotonics and Nanopatterning to join the NRF Competitive Research Programme project, “Extreme UV Nanophotonics: Quantum Control and Meta-Optical Design of Extreme Ultraviolet Light Sources.” In this role, you will turn theory into practical technology by fabricating chip-scale, free-electron-driven EUV sources and approximately 10 nm electron-beam-lithography masks. You will integrate these devices with advanced vacuum and electron-optical systems to achieve high-brightness emission at short wavelengths. You will lead the first proof-of-concept demonstration of EUV nanopatterning using a chip-scale source, strengthening NTU’s leadership in EUV nanophotonics and opening new possibilities for semiconductor lithography and metrology.

Key Responsibilities:

• Experimental Platform Development: Lead the design and assembly of high-vacuum and ultra-high vacuum (UHV) systems, custom vacuum chambers and optical setups tailored for free-electron-light interaction and EUV generation.


• Chip-Scale Source Development: Lead the development, fabrication, and integration of chip-scale EUV emitter components, including cathode nanostructures (e.g., ZnO, graphene, carbon nanotubes) and Si/Mo multilayer anode structures, using sputtering, chemical vapor deposition (CVD), and high-vacuum bonding/sealing techniques.


• EUV Nanopatterning Masks: Design and fabricate EUV nanopatterning masks (Si3N4 membrane on Si substrate) using electron-beam lithography and metal dry-etching processes to achieve nanopattern feature sizes of approximately 10 nm.


• Beam and Device Characterization: Implement and optimize electron-optical systems and diagnostic tools, including cold cathode field emission testing, to characterize electron beam properties, beam-matter interactions at the nanoscale, and device performance.


• EUV Metrology: Oversee the detection and spectral analysis of EUV radiation, ensuring high-fidelity measurements of brightness and coherence.


• Hardware Integration and Packaging: Collaborate with theorists and fabrication experts to integrate functional nanostructures (e.g., cathode/anode structures, multilayer waveguides, and nanopatterned masks) into experimental vacuum environments and perform the alignment and packaging of EUV-emitting chip-scale devices and masks.


• Proof-of-Concept Demonstrations: Conduct proof-of-concept demonstrations of EUV nanopatterning with sub-10 nm alignment precision and support the scaling of single-chip devices into multi-chip arrays for higher power output.


• Laboratory Leadership: Manage experimental workflows, oversee laboratory and cleanroom safety, and provide technical mentorship to PhD and MSc students, research assistants, and junior researchers.


• Research Dissemination: Publish research findings in leading international journals, present at prestigious international conferences and contribute to grant reporting, patent applications, and other project documentation.

Job Requirements:

• PhD and prior postdoctoral experience in Physics, Electrical Engineering, Materials Science, Applied Physics, Nanotechnology, Photonics, or a related field.


• Significant experience with electron beam systems (e.g., SEMs/TEMs or custom electron guns) and beam-matter interactions.


• Proficiency in the design and maintenance of high-vacuum and Ultra-High Vacuum (UHV) systems, including chip-scale device packaging and high-vacuum bonding/sealing techniques.


• Strong hands-on nanofabrication experience, including electron-beam lithography, photolithography, thin-film deposition (sputtering, chemical vapor deposition), and reactive- ion or metal dry etching.


• Demonstrated experience in fabricating and characterizing nanoscale and multilayer thin-film structures (e.g., metal, semiconductor, or oxide multilayers) and membrane structures such as Si3N4.


• Experience in the EUV or soft X-ray regime (e.g., synchrotron beamlines, or HHG), and familiarity with EUV detectors (CCDs, MCPs) and grazing incidence optics.


• Experience with cold cathode fabrication (e.g., ZnO, graphene, carbon nanotubes) and field emission characterization, or with nanophotonics/meta-optics and characterization of photonic nanostructures (e.g., FIB, COMSOL, Ansys, MEEP).


• Proven track record of publishing high-quality research in internationally recognized peer-reviewed journals, with excellent scientific communication and technical writing skills.


• Strong leadership, organizational, and interpersonal skills, with experience managing laboratory operations, experimental workflows, and safety compliance, and the ability to mentor students and collaborate in multidisciplinary, international research teams.


• Highly independent and hands-on, and capable of troubleshooting complex, first-of-their-kind experimental systems.

We regret that only shortlisted candidates will be notified.

Hiring Institution:

NTU A research-intensive public university, Nanyang Technological University, Singapore (NTU Singapore) has 33,000 undergraduate and postgraduate students in the Engineering, Business, Science, Humanities, Arts, & Social Sciences, and Graduate colleges. It also has a medical school, the Lee Kong Chian School of Medicine, established jointly with Imperial College London. NTU is also home to world-class autonomous institutes – the National Institute of Education, S Rajaratnam School of International Studies, Earth Observatory of Singapore, and Singapore Centre for Environmental Life Sciences Engineering – and various leading research centres such as the Nanyang Environment & Water Research Institute (NEWRI) and Energy Research Institute @ NTU (ERI@N). Ranked amongst the world’s top universities by QS, NTU has also been named the world’s top young university for the past seven years. The University’s main campus is frequently listed among the Top 15 most beautiful university campuses in the world and has 57 Green Mark-certified (equivalent to LEED-certified) buildings, of which 95% are certified Green Mark Platinum. Apart from its main campus, NTU also has a campus in Novena, Singapore’s healthcare district. Under the NTU Smart Campus vision, the University harnesses the power of digital technology and tech-enabled solutions to support better learning and living experiences, the discovery of new knowledge, and the sustainability of resources. For more information, visit www.ntu.edu.sg About NIE About RSIS About LKCMedicine About NTUItive