Principal Scientist (Optics and Lithography) (APM), IME

A*STAR RESEARCH ENTITIES; Singapore; On-site; SGD 100,000 - 150,000; Full time

Job summary

A leading research institution in Singapore is seeking a Head of Lithography to lead their central lithography team. The ideal candidate will have over 10 years of R&D experience and proficiency in photolithography tools. Responsibilities include overseeing the selection and qualification of lithography tools, engaging with stakeholders to develop new processes, and publishing research findings. This position offers a significant opportunity to influence innovation in the field.

Qualifications

• More than 10 years relevant working experience in R&D and/or industry.
• Experience with 6”, 8” and/or 12” substrate.
• Knowledge in design and simulation tools like Prolith.

Responsibilities

• Lead central lithography team and select procurement tools.
• Work with stakeholders on new lithography processes.
• Publish process development outcomes in the research community.

Skills

Photolithography tools proficiency

Metrology expertise

Lithography skills

Education

PhD/Master Degree in Materials Science or related fields

Tools

CDSEM

Mask Aligner

EBEAM Lithography tool

Job description

Job Responsibilities

• Leading central lithography team under pattern transfer group.
• Selection, procurement and qualification of litho tool sets based on program -- from contact aligner to immersion.
• Actively working with cross functional stake owners to plan and develop new lithography process.
• Validate design, reticle tap out and post tap out verification.
• Assist in internal and external technical discussion to overcome process related challenge and provide relevant solution.
• Perform process characterization, margin study to determine the process capability of new process platform.
• Act as a subject matter expert and resource for researchers and industry partners to enable process and/or product realization.
• Publish process development outcome and breakthrough in research community.
• Engage with relevant equipment makers/vendors and responsible for selecting and procuring research equipment.
• Work with fab team in establishing SPC for newly developed process.
• Act as a resource for colleagues with less experience; lead small projects with manageable risks.
• Accelerate parallel process development capability to meet aggressive project timelines and supporting faster innovation cycles.
• Build a sustainable talent pipeline across both research and engineering levels.

Job Requirements:

• PhD/ Master Degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, Chemistry, and Microelectronics, or closely related fields are welcome to apply.
• More than 10 years relevant working experiences in R&D and/or industry environment with broad exposure in handling 6”, 8” and/or 12” substrate covering nano to micron tech nodes, preferably experiences in SiC/GaN/Photonics.
• Proficient in Photolithography tools including Immersion/KrF/I-line Scanner/Stepper/Mask Aligner, knowledge in EBEAM Lithography tool will be added advantage.
• Hands-on experiences in metrology including but not limited to CDSEM, Overlay, OCD, DRSEM, Microscope. Capable to create recipe to support various research requirement.
• Knowledge in design and simulation (Prolith, OPC, etc), reticle layout (oas, gds) review and basic tap out process.
• Equip with Lithography skills set including fundamental Lithography theory, Photoresist characteristic and application, new process setup (swing curve, FEM, DOE, statistical root cause analysis and problem-solving methods, etc), optimization and margin improvement.