Senior Process Engineer Plasma

TNO; Eindhoven; On-site; EUR 78,000 - 106,000; Full time

Benefits offered by this job

Relocation package for international候

Excellent pension scheme

Flexible working hours / part-time (32

Job summary

TNO in Eindhoven is seeking a Senior Process Engineer Plasma to develop, optimize, and manage plasma processes for wafer-scale photonic chips. You will drive deposition and etching of SiO2/SiN and dry etching of III/V materials, enabling robust 6-inch InP wafer manufacturing.

You will lead cross-functional teams, apply SPC/DoE methods, and mentor junior engineers while shaping Europe’s photonics manufacturing capabilities. This role combines research impact with industrial-scale execution.

Qualifications

• A PhD, MSc, or BSc degree in physics, chemistry, materials science, electrical engineering, or a related field.
• 8+ years of experience in semiconductor process engineering, preferably in industrial wafer fabs.
• Strong expertise in dry etching of III/V semiconductor materials such as InP, GaAs, or GaN.
• Proven experience in process development, optimization, troubleshooting, and yield improvement.
• Familiarity with statistical tools (SPC, FMEA, DoE) and process characterization methods.
• Leadership experience as a cluster lead or acting cluster lead.
• Coaching and mentoring skills, with the ability to support junior colleagues and guide larger projects.
• A strategic and analytical mindset, with excellent communication and stakeholder management abilities.

Responsibilities

• Developing, qualifying, and improving plasma processes (e.g. PECVD, ICP, RIE) for 6-inch InP wafers.
• Analyzing process data, performing root cause analyses, and applying statistical methods (SPC, FMEA, DoE).
• Supporting operators and technicians with process-related issues, ensuring smooth continuation of wafer manufacturing.
• Troubleshooting disruptions and ensuring process stability and quality.
• Leading improvement projects and the introduction of new plasma tools and processes.
• Collaborating in cross-functional teams (R&D, Equipment, QA) and reporting progress to management.
• Creating and maintaining process documentation, work instructions, and best practices.
• Conducting audits and quality checks to ensure compliance and reliability.
• Mentoring junior engineers, acting as a sparring partner for cluster leads, and representing process engineering in the absence of the team leader.

Skills

Plasma etching

Statistical methods

Leadership

Wafer fabrication

Process optimization

Education

PhD/MSc/BSc in physics, chemistry, materials science, or electrical engineering

Tools

PECVD

ICP

RIE

Job description

At the forefront of Europe’s photonics innovation, TNO is building a state-of-the-art pilot line for Indium Phosphide (InP) photonic chips at the High Tech Campus in Eindhoven. As part of the EU-funded PIXEurope program, this pilot line will enable the transition from groundbreaking research to large-scale industrial manufacturing, making advanced photonic technologies faster, more reliable, and widely accessible. To help realize this ambitious step, we are looking for a Senior Process Engineer Plasma. In this role, you will develop, optimize, and manage plasma processes that are critical for wafer‑scale photonic chip production. With your expertise in deposition and etching of dielectrics and dry etching of III/V semiconductor materials, you will ensure that innovative research is transformed into stable, scalable, and high‑yield manufacturing processes.

What will be your role?

As Senior Process Engineer Plasma, you are responsible for process development and optimization in a high‑tech cleanroom environment. You will focus on deposition and etching of SiO2 and SiN layers, as well as dry etching processes for III/V semiconductors such as InP, GaAs, and GaN, enabling robust 6‑inch wafer manufacturing. By collaborating with R&D, equipment engineers, and QA teams, you ensure stable production, improve yield, and introduce new technologies into the pilot line.

Key responsibilities include:

• Developing, qualifying, and improving plasma processes (e.g. PECVD, ICP, RIE) for 6‑inch InP wafers.
• Analyzing process data, performing root cause analyses, and applying statistical methods (SPC, FMEA, DoE).
• Supporting operators and technicians with process‑related issues, ensuring smooth continuation of wafer manufacturing.
• Troubleshooting disruptions and ensuring process stability and quality.
• Leading improvement projects and the introduction of new plasma tools and processes.
• Collaborating in cross‑functional teams (R&D, Equipment, QA) and reporting progress to management.
• Creating and maintaining process documentation, work instructions, and best practices.
• Conducting audits and quality checks to ensure compliance and reliability.
• Mentoring junior engineers, acting as a sparring partner for cluster leads, and representing process engineering in the absence of the team leader.

What we expect from you

You are a highly skilled process engineer with deep knowledge of plasma etching and industrial wafer manufacturing. You combine analytical strength with hands‑on problem solving and leadership skills. You thrive in a cleanroom environment and are motivated to shape Europe’s future in integrated photonics.

• A PhD, MSc, or BSc degree in physics, chemistry, materials science, electrical engineering, or a related field.
• 8+ years of experience in semiconductor process engineering, preferably in industrial wafer fabs.
• Strong expertise in dry etching of III/V semiconductor materials such as InP, GaAs, or GaN.
• Proven experience in process development, optimization, troubleshooting, and yield improvement.
• Familiarity with statistical tools (SPC, FMEA, DoE) and process characterization methods.
• Leadership experience as a cluster lead or acting cluster lead.
• Coaching and mentoring skills, with the ability to support junior colleagues and guide larger projects.
• A strategic and analytical mindset, with excellent communication and stakeholder management abilities.

What you'll get in return

Challenging and varied work with a real impact. And plenty of opportunities as, at TNO, you are in charge of shaping your career. We offer a gross monthly salary between (based on your knowledge and experience), 8% holiday pay, a 13th month bonus of 8.33% and a flex budget (5.58% + € 180). In addition, you will be given every opportunity to develop yourself.

Benefits

• An extremely professional, innovative working environment where colleagues are leading experts in their field.
• The opportunity to attend courses, workshops and conferences, and to receive training and coaching based on your needs.
• 33 days annual leave plus a flexible holiday that can be used on a cultural, religious, or otherwise important day of your choosing (on a full‑time basis).
• An employer working towards a respectful, inclusive, and equitable work environment where every employee can flourish, with various initiatives such as Jong TNO, numerous expertise based guilds, Rainbow Community and Round Tables on diverse inclusion topics.
• We offer a comprehensive and flexible mobility plan that also includes full compensation for public transportation for commuting and business travel.
• Great social events with your team and other TNO colleagues. That’s how you will get to know a lot of people really quickly.
• Flexible working hours, the possibility to work parttime (32 or 36 hours) and the possibility of working from home.
• Extensive relocation package for international candidates.
• A good pension scheme.
• Read more about tailoring your benefits package.

TNO as an employer

Our people are at the heart of TNO. Their curiosity, expertise and entrepreneurial mindset make it possible to deliver high‑impact research and innovations that contribute to society’s sustainable wellbeing and prosperity. That is why we invest in an inspiring and inclusive working environment where colleagues can excel, have autonomy and continue to grow.

Your talent and ambition have every opportunity to flourish at TNO. You work with experts (both within and beyond TNO), have access to advanced technology and the freedom to explore, experiment and innovate. Our strength lies in independence, reliability and collaboration. We find each other in wonder and ingenuity. We are driven to push boundaries.

By working with businesses and government, and by connecting different perspectives, we strengthen our innovative capability and create responsible, meaningful results.

At TNO, we believe this is our time to help society, government and business move forward faster. Together with driven colleagues, you turn knowledge into concrete innovations or ventures that truly make a difference by combining the power of science and entrepreneurship. And in doing so, you make your mark on our time.

The selection process

The selection process comprises two interview rounds. In a final meeting we will discuss the terms of employment and your tailored benefits package. We aim to finalize the entire process within four weeks. The selection process may include an online assessment and a reference check. A certificate of Conduct (VOG) is required before starting a new job at TNO.