Senior/Principal Process Engineer – Silicon Epitaxy (Si-Si Epi)

Tata Electronics Pvt. Ltd.; Dholera; On-site; INR 1,500,000 - 2,800,000; Full time

Job summary

Tata Electronics Pvt. Ltd.

is seeking a highly motivated Silicon Epitaxy Process Engineer to lead development, optimization, qualification, and sustaining of Si-Si epitaxial growth on 300mm wafers. You will support ASM and Applied Materials epitaxy reactors and work with Integration, Device, Yield, Equipment, and Manufacturing teams to deliver robust epitaxial processes meeting quality, cost, cycle time, and yield targets.

Qualifications

• Experience in silicon epitaxy process development and optimization for CMOS, power, and HV devices.
• Hands-on with epi toolsets from ASM/Applied Materials and inline metrology.
• Strong data analysis skills and DOE methodology to drive improvements.

Responsibilities

• Develop and optimize silicon epitaxial growth processes on 300mm wafers for multiple technologies.
• Own and sustain epi platforms; drive uptime, throughput, and process stability.
• Investigate excursions using SPC, drive defect reduction, and implement corrective actions.
• Transfer epi processes from development to manufacturing with robust control plans.

Skills

Epitaxy fundamentals

Doping control

Data analysis

Cross-functional collaboration

Education

Electrical Engineering

Chemical Engineering

Physics

Tools

ASM Intrepid

AMAT Centura RP Epi

AMAT Epi Systems

Wafer handling

Job description

We are seeking a highly motivated Silicon Epitaxy Process Engineer responsible for the development, optimization, qualification, and sustaining of Si-Si epitaxial growth processes on 300mm wafers. The engineer will support ASM and/or Applied Materials epitaxy reactors and work closely with Integration, Device, Yield, Equipment, and Manufacturing teams to deliver robust epitaxial processes meeting quality, cost, cycle time, and yield targets.

Key Responsibilities:

Process Development & Optimization

• Develop and optimize silicon epitaxial growth processes for CMOS, BCD, Power, Analog, and HV technologies.
• Non-selective Si epitaxy
• Thick and thin epi layers
• High-voltage and power device epi requirements
• Optimize critical parameters including:
• Growth rate
• Thickness uniformity
• Doping concentration and uniformity
• Surface roughness
• Haze and morphology
• Evaluate process windows and define control plans.

Ownerships

• Own and sustain ASM Intrepid and/or AMAT Centura Epi platforms.
• Drive equipment matching and chamber-to-chamber consistency.
• Lead process qualifications following preventive maintenance, hardware changes, and chamber rebuilds.
• Work with Equipment Engineering to improve:
• Uptime
• MTBF
• Throughput
• Process capability

Yield & Defect Reduction

• Investigate excursions using SPC and data analytics.
• Drive reduction of:
• Stacking faults
• Slip lines
• Transition widths
• Contamination issues
• Perform root cause analysis and implement corrective actions.

Process Characterization

• Analyze and interpret metrology data from:
• SIMS
• CV Profiling
• XRD
• TEM
• SEM
• AFM
• Optical Inspection
• FTIR
• Four Point Probe
• Correlate material characteristics with electrical and device performance.
• Support NPI and technology ramp activities.
• Transfer epitaxy processes from development to manufacturing.
• Generate process specifications, FDC limits, OCAPs, and control plans.
• Provide manufacturing support for yield and output improvement initiatives.

Cross-Functional Collaboration

• Partner with:
• Process Integration
• Manufacturing
• Quality
• EHS
• Coordinate with suppliers and OEMs for process and hardware improvements.

Required Qualifications

Education

• Electrical Engineering
• Chemical Engineering
• Physics

Experience

• 4+ years of semiconductor process engineering experience.
• 3+ years of hands-on experience in Silicon Epitaxy.
• Experience with ASM and/or Applied Materials Epi tools is highly preferred.

Technical Skills:

Epitaxy Process Knowledge

• Silicon homoepitaxy fundamentals
• Gas chemistry:
• HCl chemistry
• PH₃
• AsH₃
• Auto-doping control

Equipment Knowledge

• ASM Intrepid
• AMAT Centura RP Epi
• AMAT Epi Systems
• Knowledge of reactor hardware, gas delivery, wafer handling, and thermal systems.

Data Analysis

• JMP
• Spotfire
• Python
• Minitab
• SPC/FDC systems
• DOE methodology
• Statistical analysis and process capability evaluation