Process Specialist for E-beam and UV Lithography - DTU Nanolab

DTU - Technical University of Denmark; Kongens Lyngby; On-site; DKK 550,000 - 750,000; Full time

Benefits offered by this job

Open access facility

International work environment

Job summary

DTU Nanolab at the Technical University of Denmark seeks a Process Specialist in lithography to advance e-beam and UV processes in ISO 4/5 cleanrooms. You will develop, troubleshoot, and maintain lithography systems, and train users across DTU and collaborating partners.

The role focuses on supporting academic and industrial users in micro/nanofabrication, requiring strong hands-on expertise and meticulous teamwork in an international environment.

Qualifications

• Master or PhD in a relevant field (micro/nanofabrication, physics or similar).
• Hands-on experience with e-beam lithography systems.
• Experience with UV lithography and cleanroom work.
• Ability to train users and collaborate across teams.

Responsibilities

• Develop and troubleshoot lithography processes and equipment.
• Perform daily maintenance of JEOL JBX-9500FSZ and Raith e-LINE Plus systems.
• Conduct process development and QC on lithography tools.
• Train researchers, students and engineers in equipment use and process development.

Skills

e-beam lithography

UV lithography

cleanroom work

training users

Education

MSc in engineering or physics

PhD in micro/nanofabrication or related field

Tools

JEOL JBX-9500FSZ

Raith e-LINE Plus

Job description

Job Description

If you are an experienced engineer/physicist within e-beam and UV lithography, we can offer you an exciting workplace at the Technical University of Denmark.

The cleanroom facility DTU Nanolab is looking for a process specialist for the lithography team. DTU Nanolab is one of the largest open access facilities in Europe. We enable top-down micro- and nanofabrication through a broad spectrum of advanced processing and measurement equipment supporting research, education and small-scale production activities in the fields of quantum technology, photonics, MEMS, microfluidics, biochemistry and polymer processing.

The job

As our new Process Specialist, you will work with e-beam and UV lithography. Your main responsibilities will include:

• Process development and troubleshooting within lithography processes and equipment.
• Daily maintenance of our JEOL JBX-9500FSZ and Raith e-LINE Plus e-beam lithography systems.
• Process development and QC work on these e-beam lithography systems.
• Training users in the equipment and in process development related to e-beam lithography.
• Training users on other equipment used for UV lithography, such as automatic and manual spin coaters, mask and maskless aligners, and automatic and manual developers.

You will work closely with other process specialists and technicians in the lithography team, as well as with researchers, students and engineers from DTU and commercial companies. A large part of your working day will be spent in ISO 4 and 5 cleanrooms, where you will wear a full cleanroom suit.

You must have a M.Sc. or Ph.D. degree within either engineering or physics within a relevant field (micro/nanofabrication, experimental physics or similar) and have profound knowledge and experimental skills within the area of UV and e-beam lithography.

Our expectations of you

You must have a Master of Science degree or, preferably, a PhD within a relevant field, such as micro/nanofabrication, physics or a similar field. Furthermore, we expect you to possess several of the following skills and qualifications:

• Hands-on experience with e-beam lithography systems.
• Profound knowledge of e-beam lithography processes.
• Hands-on experience with UV lithography.
• A deep understanding of the underlying physical and chemical processes in lithography.
• Hands-on experience working in a cleanroom environment.
• A broad understanding of micro- and nanoprocessing.
• You have an eye for detail and work meticulously.
• You work well in teams with people from different backgrounds.
• You are service-minded.
• You are self-driven and able to plan your own working day.
• You communicate well in written and spoken English. Knowledge of Danish is an advantage.

What We Offer In Return

We offer an interesting and challenging job in an international work environment. You will be working with state-of-the-art semiconductor manufacturing equipment. The Technical University of Denmark (DTU) is a leading technical university in northern Europe and benchmarks with the best universities in the world. We place emphasis on a high level of professionalism among our staff, so skills development is an integral part of our organization. We offer a great flexibility in the position. Please note that this is not a research position, but a technical position, with a main focus to facilitate academic and industrial users within the field of e-beam and UV lithography.

Salary and appointment terms

The appointment will be based on the collective agreement with the Danish Confederation of Professional Associations (AC). You are employed as an Academic Officer, Senior Officer, Senior Executive Officer.

In addition, supplements can be negotiated in accordance with DTU’s salary structure for academic staff employed in technical‑administrative positions at DTU (AC TAP): https://www.inside.dtu.dk/en/human-resources/during-employment/salary/salary-structures .

The position is a full-time position, preferably starting 1 December 2026 or according to mutual agreement.

The workplace is DTU Lyngby Campus.

Contact

If you would like additional information about the position, please contact Karen Birkelund, Head of Lithography and Wet Chemistry [e-mail] or phone [phone].

All interested candidates irrespective of age, gender, disability, race, religion or ethnic background are encouraged to apply. As DTU works with research in critical technology, which is subject to special rules for security and export control, open-source background checks may be conducted on qualified candidates for the position.

DTU Nanolab

DTU Nanolab is a common infrastructure and research facility located at and fully owned by the Technical University of Denmark, DTU. The core facilities consist of a large cleanroom and a state-of-the-art electron microscopy. The research activities carried out at DTU Nanolab span from nano- and microfabrication with silicon‑based materials, carbon and polymers to the highly sophisticated analysis of nanoscale materials down to atomic resolution. Since 2018, DTU Nanolab has extended to provide expertise in soft matter from small molecule complexes to biological cells.

DTU – For the benefit of society since 1829

DTU is one of Europe’s leading elite technical universities. Through research and education at an international top level, we create solutions to the major societal challenges of our time and help secure Europe’s global leadership in sustainable technological development. Since Hans Christian Ørsted founded DTU almost 200 years ago, our mission has remained the same: We develop and create value through the natural and technical sciences for the benefit of society. DTU has 13,800 students, 1,600 PhD students, and 6,500 employees. We work in an international environment and have an inclusive, stimulating, and informal work culture. DTU has campuses in all parts of Denmark and in Greenland and collaborates with the best universities around the world.