Senior Systems Engineer

Onto Innovation; Wilmington (MA); On-site; USD 115,000 - 173,000; Full time

Benefits offered by this job

Annual bonus

401(k) with employer match

Employee Stock Purchase Program (ESPP)

Wellness initiatives

Job summary

Onto Innovation is seeking a Senior Systems Engineer to lead requirements development, system integration, verification, and customer-facing technical execution for advanced semiconductor inspection and metrology platforms. This role is primarily on-site in Wilmington, MA, with travel up to 40% and opportunities to impact cross-disciplinary engineering teams.

The ideal candidate has 10+ years in systems engineering, experience with requirements management and validation, and a proven ability to

Qualifications

• Minimum 10 years in systems engineering or related fields.
• Experience with requirements management, system integration, interface control, verification and validation.
• Strong communication and ability to influence cross-functional teams.

Responsibilities

• Develop and validate system requirements, interface definitions, test plans, integration plans, and verification evidence.
• Support subsystem trade studies, integration troubleshooting, customer acceptance activities, and engineering change evaluation.
• Collaborate with hardware, software, optics, automation, manufacturing, operations, supply chain, field service, product management, marketing, and strategic customers.
• Drive technical issues to closure and clearly communicate risks.

Skills

Systems engineering

Semiconductor equipment

Requirements management

Verification & validation

Cross-functional leadership

Education

Bachelor’s in engineering

Master’s in engineering

Tools

Requirements tools

ECO processes

Job description

Position Summary

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron-level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient.

Job Summary & Responsibilities

Onto Innovation is seeking a Senior Systems Engineer to support requirements development, systems integration, verification, and customer-facing technical execution for advanced semiconductor inspection and metrology platforms. This individual contributor will work across engineering disciplines to ensure complex product requirements are translated into reliable, manufacturable, serviceable, and customer-ready system solutions. The role is primarily on-site in Wilmington, Massachusetts, with travel up to 40%.

Key Responsibilities

• Develop, maintain, and validate system requirements, interface definitions, test plans, integration plans, and verification evidence for inspection and metrology systems.
• Support subsystem trade studies, integration troubleshooting, customer acceptance activities, field issue resolution, and engineering change evaluation.
• Collaborate with hardware, software, optics, automation, manufacturing, operations, supply chain, field service, technical product support, product management, marketing, and strategic customers.
• Drive assigned technical issues to closure, communicate risks clearly, and contribute to scalable systems engineering processes.

Qualifications

Required Qualifications

• Minimum of 10 years of engineering experience in systems engineering, semiconductor equipment, capital equipment, precision instrumentation, automation, software-enabled hardware systems, optics, imaging, or related technical products.
• Experience with requirements management, system integration, interface control, verification and validation, root cause analysis, technical documentation, and customer-facing issue resolution.
• Strong ability to work independently, communicate technical issues clearly, and influence cross-functional teams.

Preferred Qualifications

• Experience in semiconductor inspection, metrology, lithography, process control, advanced packaging, optics, imaging, motion control, robotics, automation, and system-level calibration.
• Familiarity with formal requirements tools, ECO processes, issue tracking, reliability practices, customer acceptance procedures, and cleanroom environments is preferred.
• INCOSE, Six Sigma, PMP, or equivalent technical certifications are beneficial.

Education Requirements

• Minimum education: bachelor’s degree in systems engineering, mechanical engineering, electrical engineering, physics, optics, computer engineering, robotics, or a related technical discipline.
• Preferred education: master’s degree in engineering or applied science.
• Equivalent experience may substitute for formal education when supported by demonstrated systems engineering capability.

Success Characteristics

• Successful candidates demonstrate strong communication, analytical problem solving, independent thinking, ownership, accountability, execution discipline, and the ability to work effectively in a fast-paced customer-focused environment.
• First-year success includes improving requirements quality, supporting successful integrations, reducing open systems issues, accelerating customer technical responses, and strengthening cross-functional engineering alignment.

Working Conditions and Travel

This role is primarily on-site in Wilmington, Massachusetts, with domestic and international travel up to 40%. Must be able to occasionally lift up to 25 pounds and work safely in laboratory, manufacturing, cleanroom, customer-site, and office environments. Must comply with company safety standards and customer-site requirements.

Why Join Onto Innovation?

At Onto Innovation, we believe your work should matter—and so should your well-being. That’s why we offer competitive salaries and a comprehensive benefits package designed to support you and your family. From health, dental, and vision coverage to life and disability insurance, PTO, and a 401(k) with employer match, we’ve got you covered. You’ll also enjoy access to our Employee Stock Purchase Program (ESPP), wellness initiatives, and cutting-edge tools—all within a collaborative, inclusive culture where your contributions are valued and recognized.

Compensation & Growth

$115,200.00 - $172,800.00, offered in good faith and based on experience, location, and qualifications.

• Additional Rewards: Annual bonus opportunities and potential long-term incentives tied to both company and individual success.

Empowering Every Voice To Shape The Future

Onto Innovation is committed to creating a workplace where every qualified candidate has an equal opportunity to succeed. We evaluate applicants based on skills, experience, and potential - without regard to race, color, religion, gender, sexual orientation, national origin, age, disability, veteran status, or any other characteristic protected by law. We believe diversity of thought and background drives innovation and strengthens our team.

Important Note on Export Compliance

For certain positions requiring access to technical data, U.S. export licensing review may be necessary for applicants who are not U.S. Citizens, Permanent Residents, or other protected persons under 8 U.S.C. 1324b(a)(3).