Senior Scientist (MEMS), IME

A*STAR RESEARCH ENTITIES; Singapore; On-site; SGD 80,000 - 100,000; Full time

Job summary

A leading research institution in Singapore is seeking a MEMS fabrication process integrator to develop processes for MEMS-based acoustic/ultrasonic transducers and RF devices. Candidates should possess a PhD and at least 5 years of relevant experience. The role involves collaboration with multidisciplinary teams to ensure effective project execution, along with managing fabrication processes and using metrology tools.

Qualifications

• 5+ years’ experience in semiconductor process modules or MEMS-related integration.
• Strong knowledge of microfabrication processes.
• Experience with inspection and characterization methods.

Responsibilities

• Develop MEMS integration platforms based on piezo materials.
• Design integration process flows for piezoelectric MEMS devices.
• Conduct integration and fabrication of thin-film piezoelectric devices.

Skills

Microfabrication processes

Process optimization

Data analysis of wafer-level measurements

Communication skills

Team collaboration

Education

PhD in Electrical Engineering/Chemical Engineering/Mechanical Engineering/Applied Physics or equivalent

Tools

Metrology tools (DRSEM, CDSEM, ellipsometers, microscopes)

Job description

The Micro Electro Multiphysical Systems (MEMS) team is looking for a MEMS fabrication process integrator. The researcher will work with a multidisciplinary team to develop processes for the fabrication of MEMS-based acoustic/ultrasonic transducers, RF devices, and other sensor and actuator devices based on piezo materials such as PZT and ScAlN films.

Job Responsibilities

• Work with design and process module teams to develop differentiated and robust MEMS integration platforms based on PZT, ScAlN films, and other piezo materials.
• Design integration process flows for upcoming piezoelectric MEMS devices, design and execute DOEs to realize the devices.
• Conduct integration and fabrication of thin-film piezoelectric ultrasonic transducers, acoustic devices, and RF devices.
• Manage wafer lot progress in the cleanroom, conduct inspection and characterization of MEMS devices/structures and failure analysis, using metrology tools such as DRSEM, CDSEM, ellipsometers, and microscopes.
• Collaborate and communicate effectively with internal teams and external partners to provide timely project updates and ensure smooth project execution.

Job Requirements

• PhD in Electrical Engineering/Chemical Engineering/Mechanical Engineering/Applied Physics or equivalent.
• At least 5 years’ experience in semiconductor process modules, integration, or MEMS-related modules and integration.
• Strong knowledge and hands‑on experience in microfabrication processes (e.g., etch, lithography, CMP, PVD, and PECVD), with prior experience in process optimization or recipe tuning preferred.
• Good knowledge and hands‑on experience on microfabrication inspection and characterization methods, and data analysis of wafer-level measurements.
• Good communication and presentation skills, ability to work independently, as well as being an excellent team player.
• Continuously seeks opportunities to expand knowledge and skills, staying up to date with emerging trends and advancements in the field.
• Capable of conceptualizing and implementing creative approaches to address research questions and technology development.