Senior Research Engineer (Lithography)

A*STAR RESEARCH ENTITIES; Singapore; On-site; SGD 80,000 - 100,000; Full time

Job summary

A research institution in Singapore is searching for a skilled individual in lithography to manage selection and procurement of litho tool sets, develop new processes, and ensure effective collaboration with cross-functional teams. The ideal candidate will have a Master's or Bachelor's degree in a relevant field, with over 2 years of experience in R&D environments, proficiency in photolithography and hands-on metrology expertise. Communication and interpersonal skills are crucial for successful stakeholder engagement.

Qualifications

• Proficient in handling 6", 8" and/or 12" substrates.
• More than 2 years relevant working experience in R&D and/or industry.
• Knowledge in EBEAM Lithography tool is a plus.
• Hands-on experience in various metrology tools.
• Ability to create recipes to support research.

Responsibilities

• Select and procure litho tool sets for various processes.
• Work collaboratively with functional teams on lithography processes.
• Validate designs and perform verification tasks.
• Assist in technical discussions to overcome challenges.
• Publish process development outcomes.

Skills

Photolithography tools proficiency

Metrology skills

Interpersonal skills

Education

Master/Bachelor Degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, Chemistry, Microelectronics

Tools

CDSEM

Mask Aligner

Prolith

Job description

Job Description:

• Selection, procurement and qualification of litho tool sets based on program from contact aligner to immersion lithograhpy.
• Actively working with cross functional stake owners to plan and develop new lithograhpy process.
• Validate design, reticle tap out and post tap out verification.
• Assist in internal and external technical discussion to overcome process related challenge and provide relevant solution.
• Perform process characterization, margin study to determine the process capability of new process platform.
• Act as a subject matter expert and resource for researchers and industry partners to enable process and/or product realization.
• Publish process development outcome and breakthrough in research community.
• Engage with relevant equipment makers/vendors and responsible for selecting and procuring research equipment.
• Work with fab team in establishing SPC for newly developed process.

Requirements:

• Master/Bachelor Degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, Chemistry, and Microelectronics, or closely related fields are welcome to apply.
• More than 2 years relevant working experiences in R&D and/or industry environment with broad exposure in handling 6\", 8\" and/or 12\" substrate covering nano to micron tech nodes will be added advantage
• Proficient in Photolithography tools including Immersion/KrF/I-line Scanner/Stepper/Mask Aligner, knowledge in EBEAM Lithography tool will be added advantage.
• Hands-on experiences in metrology including but not limited to CDSEM, Overlay, OCD, DRSEM, Microscope. Capable to create recipe to support various research requirement.
• Knowledge in design and simulation (Prolith, OPC, etc), reticle layout (oas, gds) review and basic tap out process.
• Equip with Lithography skills set including fundamental Lithography theory, Photoresist characteristic and application, new process setup (swing curve, FEM, DOE, statistical root cause analysis and problem solving methods, etc), optimization and margin improvement.
• Relevant hardware and application knowledge in Lithography tools and metrology.
• Possess good interpersonal and oral/written communication skills, with ability to deliver clear and concise messages to both internal and external stakeholders.